In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure p, dynamic viscosity μ, thermal conductivity , specific heat c, density and the fluid velocity v. In this chapter examples will be given of the added value of many identical simple elements and the added value of several structures with an optimized geometry for the determination of a parameter. Placing the structures in different environments can fulfill different tasks. A short description of thermal flow sensors, pressure sensors and thermal conductivity sensors will be given.
|Award date||13 Nov 2002|
|Place of Publication||Enschede|
|Publication status||Published - 13 Nov 2002|