Distributed thermal micro sensors for fluid flow

J.J.J. van Baar

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

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Abstract

In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure p, dynamic viscosity μ, thermal conductivity , specific heat c, density and the fluid velocity v. In this chapter examples will be given of the added value of many identical simple elements and the added value of several structures with an optimized geometry for the determination of a parameter. Placing the structures in different environments can fulfill different tasks. A short description of thermal flow sensors, pressure sensors and thermal conductivity sensors will be given.
Original languageUndefined
Supervisors/Advisors
  • Regtien, Paulus P.L., Advisor
  • Elwenspoek, Michael Curt, Supervisor
Thesis sponsors
Award date13 Nov 2002
Place of PublicationEnschede
Publisher
Print ISBNs9-036-51828-8
Publication statusPublished - 13 Nov 2002

Keywords

  • EWI-10770
  • METIS-206814
  • IR-61699

Cite this

van Baar, J. J. J. (2002). Distributed thermal micro sensors for fluid flow. Enschede: Twente University Press (TUP).
van Baar, J.J.J.. / Distributed thermal micro sensors for fluid flow. Enschede : Twente University Press (TUP), 2002. 132 p.
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isbn = "9-036-51828-8",
publisher = "Twente University Press (TUP)",
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van Baar, JJJ 2002, 'Distributed thermal micro sensors for fluid flow', Enschede.

Distributed thermal micro sensors for fluid flow. / van Baar, J.J.J.

Enschede : Twente University Press (TUP), 2002. 132 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

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T1 - Distributed thermal micro sensors for fluid flow

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PY - 2002/11/13

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N2 - In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure p, dynamic viscosity μ, thermal conductivity , specific heat c, density and the fluid velocity v. In this chapter examples will be given of the added value of many identical simple elements and the added value of several structures with an optimized geometry for the determination of a parameter. Placing the structures in different environments can fulfill different tasks. A short description of thermal flow sensors, pressure sensors and thermal conductivity sensors will be given.

AB - In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure p, dynamic viscosity μ, thermal conductivity , specific heat c, density and the fluid velocity v. In this chapter examples will be given of the added value of many identical simple elements and the added value of several structures with an optimized geometry for the determination of a parameter. Placing the structures in different environments can fulfill different tasks. A short description of thermal flow sensors, pressure sensors and thermal conductivity sensors will be given.

KW - EWI-10770

KW - METIS-206814

KW - IR-61699

M3 - PhD Thesis - Research UT, graduation UT

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van Baar JJJ. Distributed thermal micro sensors for fluid flow. Enschede: Twente University Press (TUP), 2002. 132 p.