Distributed thermal micro sensors for fluid flow

J.J.J. van Baar

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    287 Downloads (Pure)


    In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure p, dynamic viscosity μ, thermal conductivity , specific heat c, density and the fluid velocity v. In this chapter examples will be given of the added value of many identical simple elements and the added value of several structures with an optimized geometry for the determination of a parameter. Placing the structures in different environments can fulfill different tasks. A short description of thermal flow sensors, pressure sensors and thermal conductivity sensors will be given.
    Original languageUndefined
    • Regtien, Paulus P.L., Advisor
    • Elwenspoek, Michael Curt, Supervisor
    Thesis sponsors
    Award date13 Nov 2002
    Place of PublicationEnschede
    Print ISBNs9-036-51828-8
    Publication statusPublished - 13 Nov 2002


    • EWI-10770
    • METIS-206814
    • IR-61699

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