Dopant Selective HF Anodic Etching of Silicon

J. Branebjerg, C.J.M. Eijkel, Johannes G.E. Gardeniers, F.C.M. van de Pol

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    14 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProceedings MEMS '91
    Place of PublicationNara, Japan
    Pages221-226
    Number of pages6
    Publication statusPublished - 30 Jan 1991

    Keywords

    • METIS-114052

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