Dopant Selective HF Anodic Etching of Silicon

J. Branebjerg, C.J.M. Eijkel, Johannes G.E. Gardeniers, F.C.M. van de Pol

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    14 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProceedings MEMS '91
    Place of PublicationNara, Japan
    Number of pages6
    Publication statusPublished - 30 Jan 1991


    • METIS-114052

    Cite this

    Branebjerg, J., Eijkel, C. J. M., Gardeniers, J. G. E., & van de Pol, F. C. M. (1991). Dopant Selective HF Anodic Etching of Silicon. In Proceedings MEMS '91 (pp. 221-226). Nara, Japan.