Original language | Undefined |
---|---|
Title of host publication | Proceedings MEMS '91 |
Place of Publication | Nara, Japan |
Pages | 221-226 |
Number of pages | 6 |
Publication status | Published - 30 Jan 1991 |
Keywords
- METIS-114052
J. Branebjerg, C.J.M. Eijkel, Johannes G.E. Gardeniers, F.C.M. van de Pol
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | Proceedings MEMS '91 |
Place of Publication | Nara, Japan |
Pages | 221-226 |
Number of pages | 6 |
Publication status | Published - 30 Jan 1991 |