Dopant Selective HF Anodic Etching of Silicon

J. Branebjerg, C.J.M. Eijkel, Johannes G.E. Gardeniers, F.C.M. van de Pol

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{8d7c150ad210496b9082fa8bfbf9ca69,

title = "Dopant Selective HF Anodic Etching of Silicon",

keywords = "METIS-114052",

author = "J. Branebjerg and C.J.M. Eijkel and Gardeniers, {Johannes G.E.} and {van de Pol}, F.C.M.",

year = "1991",

month = jan,

day = "30",

language = "Undefined",

pages = "221--226",

booktitle = "Proceedings MEMS '91",

}