Dopant Selective HF Anodic Etching of Silicon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{8d7c150ad210496b9082fa8bfbf9ca69,

title = "Dopant Selective HF Anodic Etching of Silicon",

keywords = "METIS-114052",

author = "J. Branebjerg and C.J.M. Eijkel and Gardeniers, \{Johannes G.E.\} and \{van de Pol\}, F.C.M.",

year = "1991",

month = jan,

day = "30",

language = "Undefined",

pages = "221--226",

booktitle = "Proceedings MEMS '91",

}