Double layer imprint lithography on wafers and foils from the sub-micron to the mm scale

P. Moonen, I. Yakimets, M. Péter, E.R. Meinders, Jurriaan Huskens

Research output: Contribution to journal › Article › Academic › peer-review

Original language	English
Pages (from-to)	1041-1048
Number of pages	8
Journal	ACS applied materials & interfaces
Volume	3
Publication status	Published - 2011

Keywords

@article{c0d704576e5a4f4e869b1f559fd15565,

title = "Double layer imprint lithography on wafers and foils from the sub-micron to the mm scale",

keywords = "METIS-282165",

author = "P. Moonen and I. Yakimets and M. P{\'e}ter and E.R. Meinders and Jurriaan Huskens",

year = "2011",

language = "English",

volume = "3",

pages = "1041--1048",

journal = "ACS applied materials & interfaces",

issn = "1944-8244",

publisher = "American Chemical Society",

}

TY - JOUR

T1 - Double layer imprint lithography on wafers and foils from the sub-micron to the mm scale

AU - Moonen, P.

AU - Yakimets, I.

AU - Péter, M.

AU - Meinders, E.R.

AU - Huskens, Jurriaan

PY - 2011

Y1 - 2011

KW - METIS-282165

M3 - Article

VL - 3

SP - 1041

EP - 1048

JO - ACS applied materials & interfaces

JF - ACS applied materials & interfaces

SN - 1944-8244

ER -