Double layer imprint lithography on wafers and foils from the sub-micron to the mm scale

P. Moonen, I. Yakimets, M. Péter, E.R. Meinders, Jurriaan Huskens

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)1041-1048
Number of pages8
JournalACS applied materials & interfaces
Publication statusPublished - 2011


  • METIS-282165

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