Downscaling of LPCVD High Temperature Oxides: A feasibility study

Cora Salm, J.H. Klootwijk, Marcel H.H. Weusthof, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE'98
    Place of PublicationMierlo, the Netherlands
    Number of pages4
    Publication statusPublished - 26 Nov 1998


    • METIS-113871

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