Downscaling of LPCVD High Temperature Oxides: A feasibility study

Cora Salm, J.H. Klootwijk, Marcel H.H. Weusthof, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE'98
    Place of PublicationMierlo, the Netherlands
    Pages477-480
    Number of pages4
    Publication statusPublished - 26 Nov 1998

    Keywords

    • METIS-113871

    Cite this

    Salm, C., Klootwijk, J. H., Weusthof, M. H. H., & Woerlee, P. H. (1998). Downscaling of LPCVD High Temperature Oxides: A feasibility study. In Proceedings of the SAFE'98 (pp. 477-480). Mierlo, the Netherlands.