Downscaling of LPCVD High Temperature Oxides: A feasibility study

Cora Salm, J.H. Klootwijk, Marcel H.H. Weusthof, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{bd81507b59cc47a383efd02655d4f612,

title = "Downscaling of LPCVD High Temperature Oxides: A feasibility study",

keywords = "METIS-113871",

author = "Cora Salm and J.H. Klootwijk and Weusthof, {Marcel H.H.} and P.H. Woerlee",

year = "1998",

month = nov,

day = "26",

language = "Undefined",

pages = "477--480",

booktitle = "Proceedings of the SAFE'98",

}