Downscaling of LPCVD High Temperature Oxides: A feasibility study

Cora Salm, J.H. Klootwijk, Marcel H.H. Weusthof, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE'98
    Place of PublicationMierlo, the Netherlands
    Pages477-480
    Number of pages4
    Publication statusPublished - 26 Nov 1998

    Keywords

    • METIS-113871

    Cite this

    Salm, C., Klootwijk, J. H., Weusthof, M. H. H., & Woerlee, P. H. (1998). Downscaling of LPCVD High Temperature Oxides: A feasibility study. In Proceedings of the SAFE'98 (pp. 477-480). Mierlo, the Netherlands.
    Salm, Cora ; Klootwijk, J.H. ; Weusthof, Marcel H.H. ; Woerlee, P.H. / Downscaling of LPCVD High Temperature Oxides: A feasibility study. Proceedings of the SAFE'98. Mierlo, the Netherlands, 1998. pp. 477-480
    @inproceedings{bd81507b59cc47a383efd02655d4f612,
    title = "Downscaling of LPCVD High Temperature Oxides: A feasibility study",
    keywords = "METIS-113871",
    author = "Cora Salm and J.H. Klootwijk and Weusthof, {Marcel H.H.} and P.H. Woerlee",
    year = "1998",
    month = "11",
    day = "26",
    language = "Undefined",
    pages = "477--480",
    booktitle = "Proceedings of the SAFE'98",

    }

    Salm, C, Klootwijk, JH, Weusthof, MHH & Woerlee, PH 1998, Downscaling of LPCVD High Temperature Oxides: A feasibility study. in Proceedings of the SAFE'98. Mierlo, the Netherlands, pp. 477-480.

    Downscaling of LPCVD High Temperature Oxides: A feasibility study. / Salm, Cora; Klootwijk, J.H.; Weusthof, Marcel H.H.; Woerlee, P.H.

    Proceedings of the SAFE'98. Mierlo, the Netherlands, 1998. p. 477-480.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Downscaling of LPCVD High Temperature Oxides: A feasibility study

    AU - Salm, Cora

    AU - Klootwijk, J.H.

    AU - Weusthof, Marcel H.H.

    AU - Woerlee, P.H.

    PY - 1998/11/26

    Y1 - 1998/11/26

    KW - METIS-113871

    M3 - Conference contribution

    SP - 477

    EP - 480

    BT - Proceedings of the SAFE'98

    CY - Mierlo, the Netherlands

    ER -

    Salm C, Klootwijk JH, Weusthof MHH, Woerlee PH. Downscaling of LPCVD High Temperature Oxides: A feasibility study. In Proceedings of the SAFE'98. Mierlo, the Netherlands. 1998. p. 477-480