Drag force actuated bistable microswitches for flow sensing

W.J. Kuipers, J.J.J. van Baar, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, J.H. de Boer, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)
    32 Downloads (Pure)


    This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.
    Original languageUndefined
    Title of host publicationMicro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
    Place of PublicationLos Alamitos
    Number of pages4
    ISBN (Print)0-7803-9475-5
    Publication statusPublished - 22 Jan 2006
    Event19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey
    Duration: 22 Jan 200626 Jan 2006
    Conference number: 19

    Publication series

    PublisherIEEE Computer Society Press
    ISSN (Print)1084-6999


    Conference19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
    Abbreviated titleMEMS


    • TST-Life like
    • METIS-228582
    • IR-66902
    • EWI-9176

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