Drag force actuated bistable microswitches for flow sensing

W.J. Kuipers, J.J.J. van Baar, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, J.H. de Boer, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
12 Downloads (Pure)

Abstract

This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.
Original languageUndefined
Title of host publicationMicro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Place of PublicationLos Alamitos
PublisherIEEE Computer Society
Pages658-661
Number of pages4
ISBN (Print)0-7803-9475-5
DOIs
Publication statusPublished - 22 Jan 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey
Duration: 22 Jan 200626 Jan 2006
Conference number: 19

Publication series

Name
PublisherIEEE Computer Society Press
ISSN (Print)1084-6999

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
Abbreviated titleMEMS
CountryTurkey
CityIstanbul
Period22/01/0626/01/06

Keywords

  • TST-Life like
  • METIS-228582
  • IR-66902
  • EWI-9176

Cite this

Kuipers, W. J., van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H., & Krijnen, G. J. M. (2006). Drag force actuated bistable microswitches for flow sensing. In Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on (pp. 658-661). Los Alamitos: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2006.1627885
Kuipers, W.J. ; van Baar, J.J.J. ; Dijkstra, Marcel ; Wiegerink, Remco J. ; Lammerink, Theodorus S.J. ; de Boer, J.H. ; Krijnen, Gijsbertus J.M. / Drag force actuated bistable microswitches for flow sensing. Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos : IEEE Computer Society, 2006. pp. 658-661
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title = "Drag force actuated bistable microswitches for flow sensing",
abstract = "This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.",
keywords = "TST-Life like, METIS-228582, IR-66902, EWI-9176",
author = "W.J. Kuipers and {van Baar}, J.J.J. and Marcel Dijkstra and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and {de Boer}, J.H. and Krijnen, {Gijsbertus J.M.}",
year = "2006",
month = "1",
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doi = "10.1109/MEMSYS.2006.1627885",
language = "Undefined",
isbn = "0-7803-9475-5",
publisher = "IEEE Computer Society",
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booktitle = "Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on",
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Kuipers, WJ, van Baar, JJJ, Dijkstra, M, Wiegerink, RJ, Lammerink, TSJ, de Boer, JH & Krijnen, GJM 2006, Drag force actuated bistable microswitches for flow sensing. in Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. IEEE Computer Society, Los Alamitos, pp. 658-661, 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, Istanbul, Turkey, 22/01/06. https://doi.org/10.1109/MEMSYS.2006.1627885

Drag force actuated bistable microswitches for flow sensing. / Kuipers, W.J.; van Baar, J.J.J.; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; de Boer, J.H.; Krijnen, Gijsbertus J.M.

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos : IEEE Computer Society, 2006. p. 658-661.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Drag force actuated bistable microswitches for flow sensing

AU - Kuipers, W.J.

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AU - Dijkstra, Marcel

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AU - Lammerink, Theodorus S.J.

AU - de Boer, J.H.

AU - Krijnen, Gijsbertus J.M.

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Y1 - 2006/1/22

N2 - This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.

AB - This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.

KW - TST-Life like

KW - METIS-228582

KW - IR-66902

KW - EWI-9176

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BT - Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

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Kuipers WJ, van Baar JJJ, Dijkstra M, Wiegerink RJ, Lammerink TSJ, de Boer JH et al. Drag force actuated bistable microswitches for flow sensing. In Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos: IEEE Computer Society. 2006. p. 658-661 https://doi.org/10.1109/MEMSYS.2006.1627885