Drag force actuated bistable microswitches for flow sensing

W.J. Kuipers; J.J.J. van Baar; Marcel Dijkstra; Remco J. Wiegerink; Theodorus S.J. Lammerink; J.H. de Boer; Gijsbertus J.M. Krijnen

doi:10.1109/MEMSYS.2006.1627885

Drag force actuated bistable microswitches for flow sensing

W.J. Kuipers, J.J.J. van Baar, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, J.H. de Boer, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

32 Downloads (Pure)

Abstract

This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.

Original language	Undefined
Title of host publication	Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	658-661
Number of pages	4
ISBN (Print)	0-7803-9475-5
DOIs	https://doi.org/10.1109/MEMSYS.2006.1627885
Publication status	Published - 22 Jan 2006
Event	19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey Duration: 22 Jan 2006 → 26 Jan 2006 Conference number: 19

Publication series

Name
Publisher	IEEE Computer Society Press
ISSN (Print)	1084-6999

Conference

Conference	19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
Abbreviated title	MEMS
Country/Territory	Turkey
City	Istanbul
Period	22/01/06 → 26/01/06

Keywords

TST-Life like
METIS-228582
IR-66902
EWI-9176

Access to Document

10.1109/MEMSYS.2006.1627885

DRAG_FORCE_ACTUATED_BISTABLE_MICROSWITCHES_FOR_FLOW_SENSING

Cite this

@inproceedings{a3e3243454c54b82a9f7e1cccf34a01c,

title = "Drag force actuated bistable microswitches for flow sensing",

abstract = "This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.",

keywords = "TST-Life like, METIS-228582, IR-66902, EWI-9176",

author = "W.J. Kuipers and {van Baar}, J.J.J. and Marcel Dijkstra and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and {de Boer}, J.H. and Krijnen, {Gijsbertus J.M.}",

year = "2006",

month = jan,

day = "22",

doi = "10.1109/MEMSYS.2006.1627885",

language = "Undefined",

isbn = "0-7803-9475-5",

publisher = "IEEE",

pages = "658--661",

booktitle = "Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on",

note = "null ; Conference date: 22-01-2006 Through 26-01-2006",

}

Kuipers, WJ, van Baar, JJJ, Dijkstra, M, Wiegerink, RJ , Lammerink, TSJ, de Boer, JH & Krijnen, GJM 2006, Drag force actuated bistable microswitches for flow sensing. in Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. IEEE, Los Alamitos, pp. 658-661, 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, Istanbul, Turkey, 22/01/06. https://doi.org/10.1109/MEMSYS.2006.1627885

Drag force actuated bistable microswitches for flow sensing. / Kuipers, W.J.; van Baar, J.J.J.; Dijkstra, Marcel et al.

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos : IEEE, 2006. p. 658-661.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Drag force actuated bistable microswitches for flow sensing

AU - Kuipers, W.J.

AU - van Baar, J.J.J.

AU - Dijkstra, Marcel

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - de Boer, J.H.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 19

PY - 2006/1/22

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N2 - This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.

AB - This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in antiphase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.

KW - TST-Life like

KW - METIS-228582

KW - IR-66902

KW - EWI-9176

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DO - 10.1109/MEMSYS.2006.1627885

M3 - Conference contribution

SN - 0-7803-9475-5

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EP - 661

BT - Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

PB - IEEE

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Y2 - 22 January 2006 through 26 January 2006

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