Dry development of photosesitive polyimides for microelectronic applications

J. Munoz, C. Dominguez, R.E.G. van Hal, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)
    Original languageUndefined
    Title of host publicationin New Horizons for Materials, Advances in Science an Technology, Ed. Vincenzini, Techna
    Place of PublicationFlorence
    Pages451-456
    Number of pages6
    Publication statusPublished - 14 Feb 1995

    Keywords

    • METIS-113770

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