Dry development of photosesitive polyimides for microelectronic applications

J. Munoz, C. Dominguez, R.E.G. van Hal, Piet Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	in New Horizons for Materials, Advances in Science an Technology, Ed. Vincenzini, Techna
Place of Publication	Florence
Pages	451-456
Number of pages	6
Publication status	Published - 14 Feb 1995

Keywords

@inproceedings{1671d3c1bbe64c32a3e7c35ba35af420,

title = "Dry development of photosesitive polyimides for microelectronic applications",

keywords = "METIS-113770",

author = "J. Munoz and C. Dominguez and {van Hal}, R.E.G. and Piet Bergveld",

year = "1995",

month = feb,

day = "14",

language = "Undefined",

pages = "451--456",

booktitle = "in New Horizons for Materials, Advances in Science an Technology, Ed. Vincenzini, Techna",

}

in New Horizons for Materials, Advances in Science an Technology, Ed. Vincenzini, Techna. Florence, 1995. p. 451-456.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Dry development of photosesitive polyimides for microelectronic applications

AU - Munoz, J.

AU - Dominguez, C.

AU - van Hal, R.E.G.

AU - Bergveld, Piet

PY - 1995/2/14

Y1 - 1995/2/14

KW - METIS-113770

M3 - Conference contribution

SP - 451

EP - 456

BT - in New Horizons for Materials, Advances in Science an Technology, Ed. Vincenzini, Techna

CY - Florence

ER -