Dry etching processes for silicon micromachining using SF6/CHF3/N2 gas mixtures

M.A. Boer, Henricus V. Jansen, R. Legtenberg, V.L. Spiering, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 30 Jun 1994
Event	MESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands Duration: 30 Jun 1994 → 30 Jun 1994

Keywords

@conference{0c143e9ac9a54ced8ef6da58f30277e5,

title = "Dry etching processes for silicon micromachining using SF6/CHF3/N2 gas mixtures",

keywords = "METIS-114650",

author = "M.A. Boer and Jansen, {Henricus V.} and R. Legtenberg and V.L. Spiering and Elwenspoek, {Michael Curt}",

year = "1994",

month = jun,

day = "30",

language = "Undefined",

pages = "--",

note = "MESA Dag 1994 ; Conference date: 30-06-1994 Through 30-06-1994",

}