Dry etching processes for silicon micromachining using SF6/CHF3/N2 gas mixtures

M.A. Boer, Henricus V. Jansen, R. Legtenberg, V.L. Spiering, Michael Curt Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 30 Jun 1994
    EventMESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands
    Duration: 30 Jun 199430 Jun 1994

    Conference

    ConferenceMESA Dag 1994
    CountryNetherlands
    CityEnschede
    Period30/06/9430/06/94
    Other(MESA Day/Meeting)

    Keywords

    • METIS-114650

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