Dry Lift-Off patterning using MEMS shadow masks

J.P. Brugger, A.M. Otter, Johannes G.M. Sanderink, M.A. Smithers

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationEurosensors XIV. The 14th European Conference on Solid-State Transducers.
    Place of PublicationCopenhagen, Denmark
    Number of pages2
    Publication statusPublished - 27 Aug 2000


    • METIS-113089

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