Dynamic diffusion rates during evolution of Mo/Si interlayers under annealing

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 14 Feb 2010

Keywords

  • METIS-265552

Cite this

@conference{5c0037e644514dd59371289cb75f2cea,
title = "Dynamic diffusion rates during evolution of Mo/Si interlayers under annealing",
keywords = "METIS-265552",
author = "A. Bosgra and Andrey Yakshin and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Frederik Bijkerk",
year = "2010",
month = "2",
day = "14",
language = "Undefined",
pages = "--",

}

TY - CONF

T1 - Dynamic diffusion rates during evolution of Mo/Si interlayers under annealing

AU - Bosgra, A.

AU - Yakshin, Andrey

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Bijkerk, Frederik

PY - 2010/2/14

Y1 - 2010/2/14

KW - METIS-265552

M3 - Poster

SP - -

ER -