Dynamic response of silicon resonant sensors

A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman, Michael Curt Elwenspoek

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 17 Jun 1993
    EventMESA Dag 1993 - Dish Hotel, Enschede, Netherlands
    Duration: 17 Jun 199317 Jun 1993

    Conference

    ConferenceMESA Dag 1993
    CountryNetherlands
    CityEnschede
    Period17/06/9317/06/93
    Other(MESA Day/Meeting)

    Keywords

    • METIS-117976

    Cite this

    Prak, A., Lammerink, T. S. J., Fluitman, J. H. J., & Elwenspoek, M. C. (1993). Dynamic response of silicon resonant sensors. -. Poster session presented at MESA Dag 1993, Enschede, Netherlands.
    Prak, A. ; Lammerink, Theodorus S.J. ; Fluitman, J.H.J. ; Elwenspoek, Michael Curt. / Dynamic response of silicon resonant sensors. Poster session presented at MESA Dag 1993, Enschede, Netherlands.
    @conference{0e08a5e57ee64e1eb0c0ddef2f81d555,
    title = "Dynamic response of silicon resonant sensors",
    keywords = "METIS-117976",
    author = "A. Prak and Lammerink, {Theodorus S.J.} and J.H.J. Fluitman and Elwenspoek, {Michael Curt}",
    year = "1993",
    month = "6",
    day = "17",
    language = "Undefined",
    pages = "--",
    note = "null ; Conference date: 17-06-1993 Through 17-06-1993",

    }

    Prak, A, Lammerink, TSJ, Fluitman, JHJ & Elwenspoek, MC 1993, 'Dynamic response of silicon resonant sensors' MESA Dag 1993, Enschede, Netherlands, 17/06/93 - 17/06/93, pp. -.

    Dynamic response of silicon resonant sensors. / Prak, A.; Lammerink, Theodorus S.J.; Fluitman, J.H.J.; Elwenspoek, Michael Curt.

    1993. - Poster session presented at MESA Dag 1993, Enschede, Netherlands.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Dynamic response of silicon resonant sensors

    AU - Prak, A.

    AU - Lammerink, Theodorus S.J.

    AU - Fluitman, J.H.J.

    AU - Elwenspoek, Michael Curt

    PY - 1993/6/17

    Y1 - 1993/6/17

    KW - METIS-117976

    M3 - Poster

    SP - -

    ER -

    Prak A, Lammerink TSJ, Fluitman JHJ, Elwenspoek MC. Dynamic response of silicon resonant sensors. 1993. Poster session presented at MESA Dag 1993, Enschede, Netherlands.