Dynamic response of silicon resonant sensors

A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman, Michael Curt Elwenspoek

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 17 Jun 1993
    EventMESA Dag 1993 - Dish Hotel, Enschede, Netherlands
    Duration: 17 Jun 199317 Jun 1993

    Conference

    ConferenceMESA Dag 1993
    CountryNetherlands
    CityEnschede
    Period17/06/9317/06/93
    Other(MESA Day/Meeting)

    Keywords

    • METIS-117976

    Cite this

    Prak, A., Lammerink, T. S. J., Fluitman, J. H. J., & Elwenspoek, M. C. (1993). Dynamic response of silicon resonant sensors. -. Poster session presented at MESA Dag 1993, Enschede, Netherlands.