Dynamic response of silicon resonant sensors

Albert Prak, A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publication7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
    Place of PublicationYokohama, Japan
    Pages206-209
    Publication statusPublished - 7 Jun 1993
    Event7th International Conference on Solid-State Sensors and Actuators, Transducers 1993 - Yokohama, Japan
    Duration: 7 Jun 199310 Jun 1993

    Conference

    Conference7th International Conference on Solid-State Sensors and Actuators, Transducers 1993
    Period7/06/9310/06/93
    OtherJune 7-10, 1993

    Keywords

    • METIS-114138
    • IR-17243

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