Dynamic response of silicon resonant sensors

Albert Prak, A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
Place of Publication	Yokohama, Japan
Pages	206-209
Publication status	Published - 7 Jun 1993
Event	7th International Conference on Solid-State Sensors and Actuators, Transducers 1993 - Yokohama, Japan Duration: 7 Jun 1993 → 10 Jun 1993

Conference	7th International Conference on Solid-State Sensors and Actuators, Transducers 1993
Period	7/06/93 → 10/06/93
Other	June 7-10, 1993

Keywords

@inproceedings{59198a96ffdc4488a03935e6ea5c5e52,

title = "Dynamic response of silicon resonant sensors",

keywords = "METIS-114138, IR-17243",

author = "Albert Prak and A. Prak and Lammerink, \{Theodorus S.J.\} and J.H.J. Fluitman and Elwenspoek, \{Michael Curt\}",

year = "1993",

month = jun,

day = "7",

language = "Undefined",

pages = "206--209",

booktitle = "7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)",

note = "7th International Conference on Solid-State Sensors and Actuators, Transducers 1993 ; Conference date: 07-06-1993 Through 10-06-1993",

}

TY - GEN

T1 - Dynamic response of silicon resonant sensors

AU - Prak, Albert

AU - Prak, A.

AU - Lammerink, Theodorus S.J.

AU - Fluitman, J.H.J.

AU - Elwenspoek, Michael Curt

PY - 1993/6/7

Y1 - 1993/6/7

KW - METIS-114138

KW - IR-17243

M3 - Conference contribution

SP - 206

EP - 209

BT - 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)

CY - Yokohama, Japan

T2 - 7th International Conference on Solid-State Sensors and Actuators, Transducers 1993

Y2 - 7 June 1993 through 10 June 1993

ER -