Dynamic response of silicon resonant sensors

A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman, Michael Curt Elwenspoek

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 7 Jun 1993
    Event7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    - Yokohama, Japan
    Duration: 7 Jun 199310 Jun 1993
    Conference number: 7

    Conference

    Conference7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    Abbreviated titleTRANSDUCERS '93
    CountryJapan
    CityYokohama
    Period7/06/9310/06/93

    Keywords

    • METIS-117994

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