Dynamic response of silicon resonant sensors

A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman, Michael Curt Elwenspoek

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 7 Jun 1993
    Event7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    - Yokohama, Japan
    Duration: 7 Jun 199310 Jun 1993
    Conference number: 7

    Conference

    Conference7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    Abbreviated titleTRANSDUCERS '93
    CountryJapan
    CityYokohama
    Period7/06/9310/06/93

    Keywords

    • METIS-117994

    Cite this

    Prak, A., Lammerink, T. S. J., Fluitman, J. H. J., & Elwenspoek, M. C. (1993). Dynamic response of silicon resonant sensors. -. Poster session presented at 7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    , Yokohama, Japan.
    Prak, A. ; Lammerink, Theodorus S.J. ; Fluitman, J.H.J. ; Elwenspoek, Michael Curt. / Dynamic response of silicon resonant sensors. Poster session presented at 7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    , Yokohama, Japan.
    @conference{57c113d6f7eb4ea1bf4b90b17b603355,
    title = "Dynamic response of silicon resonant sensors",
    keywords = "METIS-117994",
    author = "A. Prak and Lammerink, {Theodorus S.J.} and J.H.J. Fluitman and Elwenspoek, {Michael Curt}",
    year = "1993",
    month = "6",
    day = "7",
    language = "Undefined",
    pages = "--",
    note = "null ; Conference date: 07-06-1993 Through 10-06-1993",

    }

    Prak, A, Lammerink, TSJ, Fluitman, JHJ & Elwenspoek, MC 1993, 'Dynamic response of silicon resonant sensors' 7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    , Yokohama, Japan, 7/06/93 - 10/06/93, pp. -.

    Dynamic response of silicon resonant sensors. / Prak, A.; Lammerink, Theodorus S.J.; Fluitman, J.H.J.; Elwenspoek, Michael Curt.

    1993. - Poster session presented at 7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    , Yokohama, Japan.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Dynamic response of silicon resonant sensors

    AU - Prak, A.

    AU - Lammerink, Theodorus S.J.

    AU - Fluitman, J.H.J.

    AU - Elwenspoek, Michael Curt

    PY - 1993/6/7

    Y1 - 1993/6/7

    KW - METIS-117994

    M3 - Poster

    SP - -

    ER -

    Prak A, Lammerink TSJ, Fluitman JHJ, Elwenspoek MC. Dynamic response of silicon resonant sensors. 1993. Poster session presented at 7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
    , Yokohama, Japan.