Dynamic response of silicon resonant sensors

A. Prak; Theodorus S.J. Lammerink; J.H.J. Fluitman; Michael Curt Elwenspoek

Dynamic response of silicon resonant sensors

A. Prak, Theodorus S.J. Lammerink, J.H.J. Fluitman, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 7 Jun 1993
Event	7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993 - Yokohama, Japan Duration: 7 Jun 1993 → 10 Jun 1993 Conference number: 7

Conference

Conference	7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993
Abbreviated title	TRANSDUCERS '93
Country/Territory	Japan
City	Yokohama
Period	7/06/93 → 10/06/93

Keywords

METIS-117994

Cite this

@conference{57c113d6f7eb4ea1bf4b90b17b603355,

title = "Dynamic response of silicon resonant sensors",

keywords = "METIS-117994",

author = "A. Prak and Lammerink, {Theodorus S.J.} and J.H.J. Fluitman and Elwenspoek, {Michael Curt}",

year = "1993",

month = jun,

day = "7",

language = "Undefined",

pages = "--",

note = "7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993<br/> ; Conference date: 07-06-1993 Through 10-06-1993",

}

TY - CONF

T1 - Dynamic response of silicon resonant sensors

AU - Prak, A.

AU - Lammerink, Theodorus S.J.

AU - Fluitman, J.H.J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 7

PY - 1993/6/7

Y1 - 1993/6/7

KW - METIS-117994

M3 - Poster

SP - -

T2 - 7th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 1993<br/>

Y2 - 7 June 1993 through 10 June 1993

ER -