Effect of cavity pressure on the performance of the explosive micro-bubble actuator

D.M. van den Broek; Michael Curt Elwenspoek

doi:10.1016/j.mee.2008.11.099

Effect of cavity pressure on the performance of the explosive micro-bubble actuator

D.M. van den Broek, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

Abstract

The explosive micro-bubble actuator is a new type of actuator based on bubble generation by explosive evaporation. It can operate at frequencies up to 5 kHz which is extremely high for a thermo-pneumatic actuator. At these frequencies, the device can still produce a pressure of several bars resulting in a membrane deflection of several micrometers. The influence of the pressure inside the cavity on the performance is investigated. The maximum repetition frequency is related to the formation of permanent gas bubbles. By increasing the pressure in the cavity the influence of these bubbles can be decreased. The cavity pressure proves to be a useful tool to increase the performance of the explosive micro-bubble actuator.

Original language	Undefined
Article number	10.1016/j.mee.2008.11.099
Pages (from-to)	1271-1273
Number of pages	3
Journal	Microelectronic engineering
Volume	86
Issue number	4-6
DOIs	https://doi.org/10.1016/j.mee.2008.11.099
Publication status	Published - Apr 2009

Keywords

EWI-17039
IR-68980
METIS-264259

Access to Document

10.1016/j.mee.2008.11.099

http://eprints.eemcs.utwente.nl/secure2/17039/01/Effect_of_cavity-Dennis_vd_Broek-09.pdf

Cite this

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title = "Effect of cavity pressure on the performance of the explosive micro-bubble actuator",

abstract = "The explosive micro-bubble actuator is a new type of actuator based on bubble generation by explosive evaporation. It can operate at frequencies up to 5 kHz which is extremely high for a thermo-pneumatic actuator. At these frequencies, the device can still produce a pressure of several bars resulting in a membrane deflection of several micrometers. The influence of the pressure inside the cavity on the performance is investigated. The maximum repetition frequency is related to the formation of permanent gas bubbles. By increasing the pressure in the cavity the influence of these bubbles can be decreased. The cavity pressure proves to be a useful tool to increase the performance of the explosive micro-bubble actuator.",

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AU - Elwenspoek, Michael Curt

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N2 - The explosive micro-bubble actuator is a new type of actuator based on bubble generation by explosive evaporation. It can operate at frequencies up to 5 kHz which is extremely high for a thermo-pneumatic actuator. At these frequencies, the device can still produce a pressure of several bars resulting in a membrane deflection of several micrometers. The influence of the pressure inside the cavity on the performance is investigated. The maximum repetition frequency is related to the formation of permanent gas bubbles. By increasing the pressure in the cavity the influence of these bubbles can be decreased. The cavity pressure proves to be a useful tool to increase the performance of the explosive micro-bubble actuator.

AB - The explosive micro-bubble actuator is a new type of actuator based on bubble generation by explosive evaporation. It can operate at frequencies up to 5 kHz which is extremely high for a thermo-pneumatic actuator. At these frequencies, the device can still produce a pressure of several bars resulting in a membrane deflection of several micrometers. The influence of the pressure inside the cavity on the performance is investigated. The maximum repetition frequency is related to the formation of permanent gas bubbles. By increasing the pressure in the cavity the influence of these bubbles can be decreased. The cavity pressure proves to be a useful tool to increase the performance of the explosive micro-bubble actuator.

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KW - METIS-264259

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