Effect of electric fields generated by microactuators on the imaging in electron microscopy

Rolf Vermeer, L.A. Woldering, Leon Abelmann

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    In this paper we are investigating the potential to employ small devices in crucial areas with limited volumes in electron microscopes. We present the analysis of the electric fields that are present in an electrostatically actuated micro electro mechanical systems (MEMS) device. The electric fields are modeled using finite elements methods (FEM). Preliminary results are shown from scanning electron microscope (SEM) measurements of an electrostatically actuated two degrees of freedom (2DOF) nanometer precision table. From the FEM results the influence of the electric fields on an electron beam traversing the devices can be calculated. This influence is calculated to be a trajectory displacement in the order of tens of nanometers for typical acceleration voltages. SEM measurements show significant vibrations in the images of nonmovable parts of the devices when applying actuation voltages to the devices. This shows an effect of actuation on the detected electrons while imaging. Deflections up to 2.2 μm have been observed for a voltage of 80 Vpp. This deflection cannot be fully attributed to deflections of the incoming beam. Therefore we include in a qualitative analysis the trajectory of emitted secondary electrons that are detected.
    Original languageUndefined
    Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
    Place of PublicationNorway
    PublisherVestfold University College
    Number of pages4
    ISBN (Print)978-82-7860-224-9
    Publication statusPublished - 2011
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
    Duration: 19 Jun 201122 Jun 2011
    Conference number: 22

    Publication series

    PublisherVestfold University College, Department of Micro and Nano Systems Technology


    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
    Abbreviated titleMME


    • METIS-285014
    • IR-79396
    • MEMS
    • FEM
    • TST-SMI: Formerly in EWI-SMI
    • Electrostatic actuation
    • Electron microscopy
    • TST-uSPAM: micro Scanning Probe Array Memory
    • EWI-21306

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