Effect of gas pressure on properties of FePt film sputtered on polymer substrate

L.T. Nguyen; A. Lisfi; J.C. Lodder

doi:10.1063/1.1688674

Effect of gas pressure on properties of FePt film sputtered on polymer substrate

L.T. Nguyen, A. Lisfi, J.C. Lodder

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Abstract

FePt thin films ~70 nm thick! have been prepared by dc sputtering under a variable Ar pressure (4x10^-3-4x10^-2 mb) and have been annealed at temperatures ranging from 300 to 400 °C. With increasing Ar pressure, the ordering process requires a lower annealing temperature. However, further increase of Ar pressure deteriorates the crystallinity of the film which hinders the transformation from fcc to fct structure. The structural analyses show a strong correlation between the ordering process and the microstructure.

Original language	English
Pages (from-to)	7492-7494
Number of pages	3
Journal	Journal of Applied Physics
Volume	95
Issue number	11
DOIs	https://doi.org/10.1063/1.1688674
Publication status	Published - 2004

Keywords

SMI-TST: From 2006 in EWI-TST
SMI-MAT: MATERIALS

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abstract = "FePt thin films ~70 nm thick! have been prepared by dc sputtering under a variable Ar pressure (4x10-3-4x10-2 mb) and have been annealed at temperatures ranging from 300 to 400 °C. With increasing Ar pressure, the ordering process requires a lower annealing temperature. However, further increase of Ar pressure deteriorates the crystallinity of the film which hinders the transformation from fcc to fct structure. The structural analyses show a strong correlation between the ordering process and the microstructure.",

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Effect of gas pressure on properties of FePt film sputtered on polymer substrate

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