Effect van temperatuurbehandeling op stabiliteit van Ta2O5 ISFETSs

Johan G. Bomer, Piet Bergveld

    Research output: Contribution to conferencePoster

    Original languageDutch
    Pages-
    Publication statusPublished - 28 Nov 1990
    EventFOM dagen 1990 - Veldhoven, Netherlands
    Duration: 28 Nov 199030 Nov 1990

    Conference

    ConferenceFOM dagen 1990
    CountryNetherlands
    CityVeldhoven
    Period28/11/9030/11/90

    Keywords

    • METIS-118047

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