Effects of Oxygen, Nitrogen and Fluorine on the Crystallinity of Tungsten by Hot-Wire Assisted ALD

Mengdi Yang, Antonius A.I. Aarnink, Rob A.M. Wolters, Jurriaan Schmitz, Alexey Y. Kovalgin

    Research output: Contribution to journal › Article › Academic › peer-review

    3 Citations (Scopus)
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