Effects on imaging by tilting electrostatic actuators in electron microscopy

A.J. Been, Rolf Vermeer, L.A. Woldering, Leon Abelmann

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Abstract

    In this paper we investigate the influence of tilted electrostatic actuators on the imaging in electron microscopes. Previous studies have shown image deformation by electrostatic actuation in electron microscopes, and suggested a strong influence of the tilt angle on the deflection of the electron beam. Our model suggests an influence of 1 \mu m/$^\circ$ of the tilt angle on the amplitude of deflection. Preliminary experimental results indicate an influence of the angle on the amplitude of deflection, but the observed effect is two orders of magnitude smaller than simulations predict. However, there are still some variables we have not explored that might influence the strength of the influence of tilt.
    Original languageUndefined
    Title of host publication23rd Micromechanics and Microsystems Europe Workshop, MME 2012
    Place of PublicationIlmenau
    PublisherIlmenau University of Technology
    PagesB14
    Number of pages4
    ISBN (Print)978-3-938843-71-0
    Publication statusPublished - Aug 2012
    Event23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany
    Duration: 9 Sep 201212 Sep 2012
    Conference number: 23

    Publication series

    Name
    PublisherIlmenau University of Technology

    Workshop

    Workshop23rd Micromechanics and Microsystems Europe Workshop, MME 2012
    Abbreviated titleMME
    CountryGermany
    CityIlmenau
    Period9/09/1212/09/12

    Keywords

    • TST-SMI: Formerly in EWI-SMI
    • EWI-22502
    • MEMS
    • METIS-289779
    • Electron microscopy
    • IR-82161
    • Electrostatic actuation

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