# Effects on imaging by tilting electrostatic actuators in electron microscopy

A.J. Been, Rolf Vermeer, L.A. Woldering, Leon Abelmann

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

## Abstract

In this paper we investigate the influence of tilted electrostatic actuators on the imaging in electron microscopes. Previous studies have shown image deformation by electrostatic actuation in electron microscopes, and suggested a strong influence of the tilt angle on the deflection of the electron beam. Our model suggests an influence of 1 \mu m/$^\circ$ of the tilt angle on the amplitude of deflection. Preliminary experimental results indicate an influence of the angle on the amplitude of deflection, but the observed effect is two orders of magnitude smaller than simulations predict. However, there are still some variables we have not explored that might influence the strength of the influence of tilt.
Original language Undefined 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 Ilmenau Ilmenau University of Technology B14 4 978-3-938843-71-0 Published - Aug 2012 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, GermanyDuration: 9 Sep 2012 → 12 Sep 2012Conference number: 23

### Publication series

Name Ilmenau University of Technology

### Workshop

Workshop 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 MME Germany Ilmenau 9/09/12 → 12/09/12

## Keywords

• TST-SMI: Formerly in EWI-SMI
• EWI-22502
• MEMS
• METIS-289779
• Electron microscopy
• IR-82161
• Electrostatic actuation