Effects on imaging by tilting electrostatic actuators in electron microscopy

A.J. Been; Rolf Vermeer; L.A. Woldering; Leon Abelmann

Effects on imaging by tilting electrostatic actuators in electron microscopy

A.J. Been, Rolf Vermeer, L.A. Woldering, Leon Abelmann

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

In this paper we investigate the influence of tilted electrostatic actuators on the imaging in electron microscopes. Previous studies have shown image deformation by electrostatic actuation in electron microscopes, and suggested a strong influence of the tilt angle on the deflection of the electron beam. Our model suggests an influence of 1 \mu m/$^\circ$ of the tilt angle on the amplitude of deflection. Preliminary experimental results indicate an influence of the angle on the amplitude of deflection, but the observed effect is two orders of magnitude smaller than simulations predict. However, there are still some variables we have not explored that might influence the strength of the influence of tilt.

Original language	Undefined
Title of host publication	23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Place of Publication	Ilmenau
Publisher	Ilmenau University of Technology
Pages	B14
Number of pages	4
ISBN (Print)	978-3-938843-71-0
Publication status	Published - Aug 2012
Event	23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sep 2012 → 12 Sep 2012 Conference number: 23

Publication series

Name
Publisher	Ilmenau University of Technology

Workshop

Workshop	23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Abbreviated title	MME
Country	Germany
City	Ilmenau
Period	9/09/12 → 12/09/12

Keywords

TST-SMI: Formerly in EWI-SMI
EWI-22502
MEMS
METIS-289779
Electron microscopy
IR-82161
Electrostatic actuation

Access to Document

http://eprints.eemcs.utwente.nl/secure2/22502/01/B14_1668_MME2012_120806.pdf

Cite this

@inproceedings{bb42e99a173f4b339d4b545a54fa1183,

title = "Effects on imaging by tilting electrostatic actuators in electron microscopy",

abstract = "In this paper we investigate the influence of tilted electrostatic actuators on the imaging in electron microscopes. Previous studies have shown image deformation by electrostatic actuation in electron microscopes, and suggested a strong influence of the tilt angle on the deflection of the electron beam. Our model suggests an influence of 1 \mu m/$^\circ$ of the tilt angle on the amplitude of deflection. Preliminary experimental results indicate an influence of the angle on the amplitude of deflection, but the observed effect is two orders of magnitude smaller than simulations predict. However, there are still some variables we have not explored that might influence the strength of the influence of tilt.",

keywords = "TST-SMI: Formerly in EWI-SMI, EWI-22502, MEMS, METIS-289779, Electron microscopy, IR-82161, Electrostatic actuation",

author = "A.J. Been and Rolf Vermeer and L.A. Woldering and Leon Abelmann",

year = "2012",

month = aug,

language = "Undefined",

isbn = "978-3-938843-71-0",

publisher = "Ilmenau University of Technology",

pages = "B14",

booktitle = "23rd Micromechanics and Microsystems Europe Workshop, MME 2012",

note = "null ; Conference date: 09-09-2012 Through 12-09-2012",

}

Been, AJ, Vermeer, R, Woldering, LA & Abelmann, L 2012, Effects on imaging by tilting electrostatic actuators in electron microscopy. in 23rd Micromechanics and Microsystems Europe Workshop, MME 2012. Ilmenau University of Technology, Ilmenau, pp. B14, 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, Ilmenau, Germany, 9/09/12. <http://eprints.eemcs.utwente.nl/secure2/22502/01/B14_1668_MME2012_120806.pdf>

TY - GEN

T1 - Effects on imaging by tilting electrostatic actuators in electron microscopy

AU - Been, A.J.

AU - Vermeer, Rolf

AU - Woldering, L.A.

AU - Abelmann, Leon

N1 - Conference code: 23

PY - 2012/8

Y1 - 2012/8

N2 - In this paper we investigate the influence of tilted electrostatic actuators on the imaging in electron microscopes. Previous studies have shown image deformation by electrostatic actuation in electron microscopes, and suggested a strong influence of the tilt angle on the deflection of the electron beam. Our model suggests an influence of 1 \mu m/$^\circ$ of the tilt angle on the amplitude of deflection. Preliminary experimental results indicate an influence of the angle on the amplitude of deflection, but the observed effect is two orders of magnitude smaller than simulations predict. However, there are still some variables we have not explored that might influence the strength of the influence of tilt.

AB - In this paper we investigate the influence of tilted electrostatic actuators on the imaging in electron microscopes. Previous studies have shown image deformation by electrostatic actuation in electron microscopes, and suggested a strong influence of the tilt angle on the deflection of the electron beam. Our model suggests an influence of 1 \mu m/$^\circ$ of the tilt angle on the amplitude of deflection. Preliminary experimental results indicate an influence of the angle on the amplitude of deflection, but the observed effect is two orders of magnitude smaller than simulations predict. However, there are still some variables we have not explored that might influence the strength of the influence of tilt.

KW - TST-SMI: Formerly in EWI-SMI

KW - EWI-22502

KW - MEMS

KW - METIS-289779

KW - Electron microscopy

KW - IR-82161

KW - Electrostatic actuation

M3 - Conference contribution

SN - 978-3-938843-71-0

SP - B14

BT - 23rd Micromechanics and Microsystems Europe Workshop, MME 2012

PB - Ilmenau University of Technology

CY - Ilmenau

Y2 - 9 September 2012 through 12 September 2012

ER -