Abstract
In this paper we investigate the influence of tilted electrostatic actuators on the imaging in electron microscopes. Previous studies have shown image deformation by electrostatic actuation in electron microscopes, and suggested a strong influence of the tilt angle on the deflection of the electron beam. Our model suggests an influence of 1 \mu m/$^\circ$ of the tilt angle on the amplitude of deflection. Preliminary experimental results indicate an influence of the angle on the amplitude of deflection, but the observed effect is two orders of magnitude smaller than simulations predict. However, there are still some variables we have not explored that might influence the strength of the influence of tilt.
| Original language | English |
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| Title of host publication | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 |
| Place of Publication | Ilmenau |
| Publisher | Ilmenau University of Technology |
| Pages | B14 |
| Number of pages | 4 |
| ISBN (Print) | 978-3-938843-71-0 |
| Publication status | Published - Aug 2012 |
| Event | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sept 2012 → 12 Sept 2012 Conference number: 23 |
Workshop
| Workshop | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 |
|---|---|
| Abbreviated title | MME |
| Country/Territory | Germany |
| City | Ilmenau |
| Period | 9/09/12 → 12/09/12 |
Keywords
- TST-SMI: Formerly in EWI-SMI
- MEMS
- Electron microscopy
- Electrostatic actuation