Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Research output: Contribution to conferencePoster

Abstract

Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.
Original languageEnglish
Pages-
Publication statusPublished - 28 Sep 2015
EventMESA+ Meeting 2015 - University of Twente, Enschede, Netherlands
Duration: 28 Sep 201528 Sep 2015
https://www.utwente.nl/mesaplus/meeting/archive/program 2015/

Conference

ConferenceMESA+ Meeting 2015
CountryNetherlands
CityEnschede
Period28/09/1528/09/15
Other(MESA+ Day/Dag)
Internet address

Keywords

  • METIS-313098

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  • Cite this

    Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J., & Bijkerk, F. (2015). Elastic modulus of Extreme Ultraviolet exposed single-layer graphene. -. Poster session presented at MESA+ Meeting 2015, Enschede, Netherlands.