Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.
|Publication status||Published - 28 Sep 2015|
|Event||MESA+ Meeting 2015 - University of Twente, Enschede, Netherlands|
Duration: 28 Sep 2015 → 28 Sep 2015
|Conference||MESA+ Meeting 2015|
|Period||28/09/15 → 28/09/15|
Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J., & Bijkerk, F. (2015). Elastic modulus of Extreme Ultraviolet exposed single-layer graphene. -. Poster session presented at MESA+ Meeting 2015, Enschede, Netherlands.