Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Research output: Contribution to conferencePoster

Abstract

Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.
Original languageEnglish
Pages-
Publication statusPublished - 6 Sep 2015

Keywords

  • METIS-313097

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