Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Baibhav Kumar Mund, An Gao, Jacobus Marinus Sturm, Christopher James Lee, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output


Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.
Original languageEnglish
Publication statusPublished - 6 Sept 2015
EventAmeland Workshop 2015 - Netherlands, Ameland
Duration: 6 Sept 201511 Sept 2015


ConferenceAmeland Workshop 2015
CityNetherlands, Ameland


  • METIS-313097


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