Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Baibhav Kumar Mund; An Gao; Jacobus Marinus Sturm; Christopher James Lee; Frederik Bijkerk

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Baibhav Kumar Mund, An Gao, Jacobus Marinus Sturm, Christopher James Lee, Frederik Bijkerk

XUV Optics

Research output: Contribution to conference › Poster

Abstract

Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.

Original language	English
Pages	-
Publication status	Published - 6 Sep 2015

Keywords

METIS-313097

Access to Document

http://www.rug.nl/research/zernike/news/otherevents/ameland2015/

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Cite this

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J., & Bijkerk, F. (2015). Elastic modulus of Extreme Ultraviolet exposed single-layer graphene. -.

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AU - Sturm, Jacobus Marinus

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AB - Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.

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