Abstract
| Original language | English |
|---|---|
| Pages | - |
| Publication status | Published - 31 Aug 2015 |
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Keywords
- METIS-313095
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Elastic modulus of Extreme Ultraviolet exposed single-layer graphene. / Mund, Baibhav Kumar; Gao, An; Sturm, Jacobus Marinus; Lee, Christopher James; Bijkerk, Frederik.
2015. -.Research output: Contribution to conference › Poster › Other research output
TY - CONF
T1 - Elastic modulus of Extreme Ultraviolet exposed single-layer graphene
AU - Mund, Baibhav Kumar
AU - Gao, An
AU - Sturm, Jacobus Marinus
AU - Lee, Christopher James
AU - Bijkerk, Frederik
PY - 2015/8/31
Y1 - 2015/8/31
N2 - Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.
AB - Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.
KW - METIS-313095
M3 - Poster
SP - -
ER -