Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Research output: Contribution to conferencePosterOther research output

Abstract

Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.
Original languageEnglish
Pages-
Publication statusPublished - 31 Aug 2015

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modulus of elasticity
graphene
reticles
protective coatings
beam splitters
tensile strength
thermal conductivity
lithography
gratings
pumps
membranes
probes
thin films

Keywords

  • METIS-313095

Cite this

@conference{51ca603e0cf841f9aef74eac26dbe815,
title = "Elastic modulus of Extreme Ultraviolet exposed single-layer graphene",
abstract = "Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.",
keywords = "METIS-313095",
author = "Mund, {Baibhav Kumar} and An Gao and Sturm, {Jacobus Marinus} and Lee, {Christopher James} and Frederik Bijkerk",
year = "2015",
month = "8",
day = "31",
language = "English",
pages = "--",

}

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene. / Mund, Baibhav Kumar; Gao, An; Sturm, Jacobus Marinus; Lee, Christopher James; Bijkerk, Frederik.

2015. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

AU - Mund, Baibhav Kumar

AU - Gao, An

AU - Sturm, Jacobus Marinus

AU - Lee, Christopher James

AU - Bijkerk, Frederik

PY - 2015/8/31

Y1 - 2015/8/31

N2 - Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.

AB - Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.

KW - METIS-313095

M3 - Poster

SP - -

ER -