Abstract
Extreme Ultraviolet (EUV) optical systems are base on reflective optics, however, highly transparent membranes are required for a number of applications that require transmission optics. These include beam splitters (EUV pump-probe experiments). Transmission gratins, and protective membranes for photomasks. Graphene is an excellent candidate due to its chemical inertness, high tensile strength, and great EUV transmission
Original language | English |
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Pages | - |
Publication status | Published - 19 Jan 2016 |
Event | Physics@FOM Veldhoven 2016 - NH Koningshof Veldhoven, Veldhoven, The Netherlands, Netherlands Duration: 20 Jan 2016 → 20 Jan 2016 |
Conference
Conference | Physics@FOM Veldhoven 2016 |
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Abbreviated title | FOM |
Country/Territory | Netherlands |
City | Veldhoven, The Netherlands |
Period | 20/01/16 → 20/01/16 |
Keywords
- METIS-315377