Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Baibhav Kumar Mund; An Gao; Jacobus Marinus Sturm; Christopher James Lee; Frederik Bijkerk

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Baibhav Kumar Mund
, An Gao
, Jacobus Marinus Sturm
, Christopher James Lee
, Frederik Bijkerk

XUV Optics

Research output: Contribution to conference › Poster › Other research output

Abstract

Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.

Original language	English
Pages	-
Publication status	Published - 28 Sept 2015
Event	MESA+ Meeting 2015 - University of Twente, Enschede, Netherlands Duration: 28 Sept 2015 → 28 Sept 2015 https://www.utwente.nl/mesaplus/meeting/archive/program 2015/

Conference

Conference	MESA+ Meeting 2015
Country/Territory	Netherlands
City	Enschede
Period	28/09/15 → 28/09/15
Other	(MESA+ Day/Dag)
Internet address	https://www.utwente.nl/mesaplus/meeting/archive/program 2015/

Keywords

METIS-313098

Access to Document

https://www.utwente.nl/mesaplus/meeting/

Cite this

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title = "Elastic modulus of Extreme Ultraviolet exposed single-layer graphene",

abstract = "Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.",

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T1 - Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

AU - Mund, Baibhav Kumar

AU - Gao, An

AU - Sturm, Jacobus Marinus

AU - Lee, Christopher James

AU - Bijkerk, Frederik

PY - 2015/9/28

Y1 - 2015/9/28

N2 - Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.

AB - Highly transparent membranes are required for a number of applications, such as protective coatings for components in Extreme Ultraviolet (EUV) lithography, beam splitters (EUV pump-probe experiments), transmission gratings, and reticles. Graphene is an excellent candidate due to its high tensile strength, thermal conductivity and EUV transmission. Also, graphene is relatively chemically inert, as compared to other thin films currently available.

KW - METIS-313098

M3 - Poster

SP - -

T2 - MESA+ Meeting 2015

Y2 - 28 September 2015 through 28 September 2015

ER -

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Abstract

Conference

Keywords

Access to Document

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Cite this