Elastocapillary fabrication of three-dimensional microstructures

J.W. van Honschoten, Johan W. Berenschot, T. Ondarcuhu, Remco G.P. Sanders, J. Sundaram, Michael Curt Elwenspoek, Niels Roelof Tas

Research output: Contribution to journalArticleAcademicpeer-review

37 Citations (Scopus)

Abstract

We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.
Original languageUndefined
Article number014103
Pages (from-to)014103/1-014103/3
Number of pages3
JournalApplied physics letters
Volume97
Issue number1
DOIs
Publication statusPublished - 9 Jul 2010

Keywords

  • EWI-18537
  • IR-73472
  • METIS-271052
  • TST-Self Assembly

Cite this

@article{97bdbc27b38142518bc10cbe39ccbadb,
title = "Elastocapillary fabrication of three-dimensional microstructures",
abstract = "We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.",
keywords = "EWI-18537, IR-73472, METIS-271052, TST-Self Assembly",
author = "{van Honschoten}, J.W. and Berenschot, {Johan W.} and T. Ondarcuhu and Sanders, {Remco G.P.} and J. Sundaram and Elwenspoek, {Michael Curt} and Tas, {Niels Roelof}",
note = "eemcs-eprint-18537",
year = "2010",
month = "7",
day = "9",
doi = "10.1063/1.3462302",
language = "Undefined",
volume = "97",
pages = "014103/1--014103/3",
journal = "Applied physics letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "1",

}

Elastocapillary fabrication of three-dimensional microstructures. / van Honschoten, J.W.; Berenschot, Johan W.; Ondarcuhu, T.; Sanders, Remco G.P.; Sundaram, J.; Elwenspoek, Michael Curt; Tas, Niels Roelof.

In: Applied physics letters, Vol. 97, No. 1, 014103, 09.07.2010, p. 014103/1-014103/3.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Elastocapillary fabrication of three-dimensional microstructures

AU - van Honschoten, J.W.

AU - Berenschot, Johan W.

AU - Ondarcuhu, T.

AU - Sanders, Remco G.P.

AU - Sundaram, J.

AU - Elwenspoek, Michael Curt

AU - Tas, Niels Roelof

N1 - eemcs-eprint-18537

PY - 2010/7/9

Y1 - 2010/7/9

N2 - We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.

AB - We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.

KW - EWI-18537

KW - IR-73472

KW - METIS-271052

KW - TST-Self Assembly

U2 - 10.1063/1.3462302

DO - 10.1063/1.3462302

M3 - Article

VL - 97

SP - 014103/1-014103/3

JO - Applied physics letters

JF - Applied physics letters

SN - 0003-6951

IS - 1

M1 - 014103

ER -