Elastocapillary fabrication of three-dimensional microstructures

J.W. van Honschoten, Johan W. Berenschot, T. Ondarcuhu, Remco G.P. Sanders, J. Sundaram, Michael Curt Elwenspoek, Niels Roelof Tas

    Research output: Contribution to journalArticleAcademicpeer-review

    39 Citations (Scopus)

    Abstract

    We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.
    Original languageUndefined
    Article number014103
    Pages (from-to)014103/1-014103/3
    Number of pages3
    JournalApplied physics letters
    Volume97
    Issue number1
    DOIs
    Publication statusPublished - 9 Jul 2010

    Keywords

    • EWI-18537
    • IR-73472
    • METIS-271052
    • TST-Self Assembly

    Cite this

    van Honschoten, J. W., Berenschot, J. W., Ondarcuhu, T., Sanders, R. G. P., Sundaram, J., Elwenspoek, M. C., & Tas, N. R. (2010). Elastocapillary fabrication of three-dimensional microstructures. Applied physics letters, 97(1), 014103/1-014103/3. [014103]. https://doi.org/10.1063/1.3462302
    van Honschoten, J.W. ; Berenschot, Johan W. ; Ondarcuhu, T. ; Sanders, Remco G.P. ; Sundaram, J. ; Elwenspoek, Michael Curt ; Tas, Niels Roelof. / Elastocapillary fabrication of three-dimensional microstructures. In: Applied physics letters. 2010 ; Vol. 97, No. 1. pp. 014103/1-014103/3.
    @article{97bdbc27b38142518bc10cbe39ccbadb,
    title = "Elastocapillary fabrication of three-dimensional microstructures",
    abstract = "We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.",
    keywords = "EWI-18537, IR-73472, METIS-271052, TST-Self Assembly",
    author = "{van Honschoten}, J.W. and Berenschot, {Johan W.} and T. Ondarcuhu and Sanders, {Remco G.P.} and J. Sundaram and Elwenspoek, {Michael Curt} and Tas, {Niels Roelof}",
    note = "eemcs-eprint-18537",
    year = "2010",
    month = "7",
    day = "9",
    doi = "10.1063/1.3462302",
    language = "Undefined",
    volume = "97",
    pages = "014103/1--014103/3",
    journal = "Applied physics letters",
    issn = "0003-6951",
    publisher = "American Institute of Physics",
    number = "1",

    }

    van Honschoten, JW, Berenschot, JW, Ondarcuhu, T, Sanders, RGP, Sundaram, J, Elwenspoek, MC & Tas, NR 2010, 'Elastocapillary fabrication of three-dimensional microstructures', Applied physics letters, vol. 97, no. 1, 014103, pp. 014103/1-014103/3. https://doi.org/10.1063/1.3462302

    Elastocapillary fabrication of three-dimensional microstructures. / van Honschoten, J.W.; Berenschot, Johan W.; Ondarcuhu, T.; Sanders, Remco G.P.; Sundaram, J.; Elwenspoek, Michael Curt; Tas, Niels Roelof.

    In: Applied physics letters, Vol. 97, No. 1, 014103, 09.07.2010, p. 014103/1-014103/3.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Elastocapillary fabrication of three-dimensional microstructures

    AU - van Honschoten, J.W.

    AU - Berenschot, Johan W.

    AU - Ondarcuhu, T.

    AU - Sanders, Remco G.P.

    AU - Sundaram, J.

    AU - Elwenspoek, Michael Curt

    AU - Tas, Niels Roelof

    N1 - eemcs-eprint-18537

    PY - 2010/7/9

    Y1 - 2010/7/9

    N2 - We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.

    AB - We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.

    KW - EWI-18537

    KW - IR-73472

    KW - METIS-271052

    KW - TST-Self Assembly

    U2 - 10.1063/1.3462302

    DO - 10.1063/1.3462302

    M3 - Article

    VL - 97

    SP - 014103/1-014103/3

    JO - Applied physics letters

    JF - Applied physics letters

    SN - 0003-6951

    IS - 1

    M1 - 014103

    ER -

    van Honschoten JW, Berenschot JW, Ondarcuhu T, Sanders RGP, Sundaram J, Elwenspoek MC et al. Elastocapillary fabrication of three-dimensional microstructures. Applied physics letters. 2010 Jul 9;97(1):014103/1-014103/3. 014103. https://doi.org/10.1063/1.3462302