Elastocapillary fabrication of three-dimensional microstructures

J.W. van Honschoten, Johan W. Berenschot, T. Ondarcuhu, Remco G.P. Sanders, J. Sundaram, Michael Curt Elwenspoek, Niels Roelof Tas

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    Abstract

    We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.
    Original languageUndefined
    Article number014103
    Pages (from-to)014103/1-014103/3
    Number of pages3
    JournalApplied physics letters
    Volume97
    Issue number1
    DOIs
    Publication statusPublished - 9 Jul 2010

    Keywords

    • EWI-18537
    • IR-73472
    • METIS-271052
    • TST-Self Assembly

    Cite this

    van Honschoten, J. W., Berenschot, J. W., Ondarcuhu, T., Sanders, R. G. P., Sundaram, J., Elwenspoek, M. C., & Tas, N. R. (2010). Elastocapillary fabrication of three-dimensional microstructures. Applied physics letters, 97(1), 014103/1-014103/3. [014103]. https://doi.org/10.1063/1.3462302