Elastocapillary fabrication of three-dimensional microstructures

J.W. van Honschoten; Johan W. Berenschot; T. Ondarcuhu; Remco G.P. Sanders; J. Sundaram; Michael Curt Elwenspoek; Niels Roelof Tas

doi:10.1063/1.3462302

Elastocapillary fabrication of three-dimensional microstructures

J.W. van Honschoten, Johan W. Berenschot, T. Ondarcuhu, Remco G.P. Sanders, J. Sundaram, Michael Curt Elwenspoek, Niels Roelof Tas

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

We describe the fabrication of three-dimensional microstructures by means of capillary forces. Using an origami-like technique, planar silicon nitride structures of various geometries are folded to produce three-dimensional objects of 50–100 m. Capillarity is a particularly effective mechanism since surface tension forces dominate over bulk forces at small scales. The spontaneous evaporation of water forms the driving mechanism for this microfabrication technique. Therefore the actuating liquid disappears in the final structure. A model describing the elastocapillary interaction of the folding process is compared with experiments. By tailoring the elastic and capillary properties a variety of three-dimensional micro-objects can be realized.

Original language	Undefined
Article number	014103
Pages (from-to)	014103/1-014103/3
Number of pages	3
Journal	Applied physics letters
Volume	97
Issue number	1
DOIs	https://doi.org/10.1063/1.3462302
Publication status	Published - 9 Jul 2010

Keywords

EWI-18537
IR-73472
METIS-271052
TST-Self Assembly

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1063/1.3462302

http://eprints.eemcs.utwente.nl/secure2/18537/01/Elastocapillary_microfabrication_-_Joost_-_juli_2010_.pdf

Cite this

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AU - van Honschoten, J.W.

AU - Berenschot, Johan W.

AU - Ondarcuhu, T.

AU - Sanders, Remco G.P.

AU - Sundaram, J.

AU - Elwenspoek, Michael Curt

AU - Tas, Niels Roelof

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KW - TST-Self Assembly

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