Abstract
In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes.
Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed.
Original language | Undefined |
---|---|
Title of host publication | Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop |
Place of Publication | Norway |
Publisher | Vestfold University College |
Pages | 250-253 |
Number of pages | 4 |
ISBN (Print) | 978-82-7860-224-9 |
Publication status | Published - 2011 |
Event | 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011 Conference number: 22 |
Publication series
Name | |
---|---|
Publisher | Vestfold University College, Department of Micro and Nano Systems Technology |
Conference
Conference | 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 |
---|---|
Abbreviated title | MME |
Country/Territory | Norway |
City | Tønsberg |
Period | 19/06/11 → 22/06/11 |
Keywords
- METIS-285016
- IR-79398
- Self-Assembly
- Microstructures
- EWI-21308
- Origami
- Three-dimensional
- elasto-capillarity
- TST-Self Assembly
- Micro-fabrication