Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube

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    In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed.
    Original languageUndefined
    Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
    Place of PublicationNorway
    PublisherDepartment of micro and nano systems technology, Vestfold University College
    Number of pages4
    ISBN (Print)978-82-7860-224-9
    Publication statusPublished - 2011
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
    Duration: 19 Jun 201122 Jun 2011
    Conference number: 22

    Publication series

    PublisherVestfold University College, Department of Micro and Nano Systems Technology


    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
    Abbreviated titleMME


    • METIS-285016
    • IR-79398
    • Self-Assembly
    • Microstructures
    • EWI-21308
    • Origami
    • Three-dimensional
    • elasto-capillarity
    • TST-Self Assembly
    • Micro-fabrication

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