Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube

A.B.H. Legrain; Johan W. Berenschot; Remco G.P. Sanders; Kechun Ma; Niels Roelof Tas; Leon Abelmann

Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube

A.B.H. Legrain, Johan W. Berenschot, Remco G.P. Sanders, Kechun Ma, Niels Roelof Tas, Leon Abelmann

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed.

Original language	Undefined
Title of host publication	Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Place of Publication	Norway
Publisher	Vestfold University College
Pages	250-253
Number of pages	4
ISBN (Print)	978-82-7860-224-9
Publication status	Published - 2011
Event	22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011 Conference number: 22

Publication series

Name
Publisher	Vestfold University College, Department of Micro and Nano Systems Technology

Conference

Conference	22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated title	MME
Country/Territory	Norway
City	Tønsberg
Period	19/06/11 → 22/06/11

Keywords

METIS-285016
IR-79398
Self-Assembly
Microstructures
EWI-21308
Origami
Three-dimensional
elasto-capillarity
TST-Self Assembly
Micro-fabrication

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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Cite this

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title = "Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube",

abstract = "In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed.",

keywords = "METIS-285016, IR-79398, Self-Assembly, Microstructures, EWI-21308, Origami, Three-dimensional, elasto-capillarity, TST-Self Assembly, Micro-fabrication",

author = "A.B.H. Legrain and Berenschot, {Johan W.} and Sanders, {Remco G.P.} and Kechun Ma and Tas, {Niels Roelof} and Leon Abelmann",

note = "http://www.mme2011.org/MME2011_Proceedings.pdf; 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 ; Conference date: 19-06-2011 Through 22-06-2011",

year = "2011",

language = "Undefined",

isbn = "978-82-7860-224-9",

publisher = "Vestfold University College",

pages = "250--253",

booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop",

}

Legrain, ABH, Berenschot, JW , Sanders, RGP , Ma, K , Tas, NR & Abelmann, L 2011, Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Vestfold University College, Norway, pp. 250-253, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11.

Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. / Legrain, A.B.H.; Berenschot, Johan W.; Sanders, Remco G.P. et al.
Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Norway: Vestfold University College, 2011. p. 250-253.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube

AU - Legrain, A.B.H.

AU - Berenschot, Johan W.

AU - Sanders, Remco G.P.

AU - Ma, Kechun

AU - Tas, Niels Roelof

AU - Abelmann, Leon

N1 - Conference code: 22

PY - 2011

Y1 - 2011

N2 - In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed.

AB - In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed.

KW - METIS-285016

KW - IR-79398

KW - Self-Assembly

KW - Microstructures

KW - EWI-21308

KW - Origami

KW - Three-dimensional

KW - elasto-capillarity

KW - TST-Self Assembly

KW - Micro-fabrication

M3 - Conference contribution

SN - 978-82-7860-224-9

SP - 250

EP - 253

BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop

PB - Vestfold University College

CY - Norway

T2 - 22nd Micromechanics and Microsystems Europe Workshop, MME 2011

Y2 - 19 June 2011 through 22 June 2011

ER -