Elastocapillary self-folding of micro-machined structures: capillary origami

Physics & Astronomy

• folding 100%
• hinges 77%
• microstructure 57%
• assembly 26%
• ribbons 23%
• wafers 22%
• fabrication 18%
• silicon nitrides 17%
• silicon 16%
• stiffening 15%
• etching 13%
• machining 12%
• causes 11%
• folding structures 10%
• masks 10%
• V grooves 8%
• conductivity 8%
• theses 7%
• electrodes 7%
• pulling 7%
• water 6%
• actuation 6%
• leaves 6%
• self assembly 6%
• thin films 6%
• drying 6%
• cleaning 6%
• platinum 5%
• stimuli 5%
• templates 5%
• interfacial tension 5%
• stiffness 5%
• pumping 5%
• lithography 5%
• routes 5%
• inversions 4%
• evaporation 4%
• trends 4%
• current density 4%
• tubes 4%
• curves 3%
• liquids 3%
• electronics 3%
• metals 3%