Electrical characterisation and properties of LPCVD WSi-N barrier layers for Cu-metallization

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, J. Holleman, P.H. Woerlee, Robertus A.M. Wolters

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of SAFE conference 2000
    Place of PublicationVeldhoven, The Netherlands
    Number of pages3
    Publication statusPublished - 29 Nov 2000


    • METIS-113895

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