Electrical characterization of advanced gate dielectrics

Robin Degraeve, Jurriaan Schmitz, Luigi Pantisano, Eddy Simoen, Michel Houssa, Ben Kaczer, Guido Groeseneken

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

    1 Citation (Scopus)

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    Physics & Astronomy