Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor

C.J. van Mullem, H.A.C. Tilmans, A.J. Mouthaan, J.H.J. Fluitman

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    26 Citations (Scopus)
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    Abstract

    An important design consideration in the development of two-port resonant sensors is the electrical cross-talk between the input port and the output port. The overall transfer function H over-bar (jω) of the two-port sensor is equal to the vectorial sum of a transfer function representing the mechanical behavior and a transfer function representing the electrical cross-talk. The resonant silicon beam force sensor with a piezoelectric driver and an piezoelectric detector is analyzed. Two solutions to reduce the level of cross-talk are presented. Proper adjustment of the value of relevant components in the sensor geometry and/or electrical interruption of the bottom electrode result in a cross-talk level close to the noise level for the frequency range of interest.
    Original languageEnglish
    Pages (from-to)168-173
    Number of pages6
    JournalSensors and actuators. A: Physical
    Volume31
    Issue number1-3
    DOIs
    Publication statusPublished - Mar 1992
    Event5th European Conference on Solid-State Transducers, Eurosensors V 1991 - Rome, Italy
    Duration: 30 Sep 19912 Oct 1991
    Conference number: 5

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