An important design consideration in the development of two-port resonant sensors is the electrical cross-talk between the input port and the output port. The overall transfer function H over-bar (jω) of the two-port sensor is equal to the vectorial sum of a transfer function representing the mechanical behavior and a transfer function representing the electrical cross-talk. The resonant silicon beam force sensor with a piezoelectric driver and an piezoelectric detector is analyzed. Two solutions to reduce the level of cross-talk are presented. Proper adjustment of the value of relevant components in the sensor geometry and/or electrical interruption of the bottom electrode result in a cross-talk level close to the noise level for the frequency range of interest.
|Number of pages||6|
|Journal||Sensors and actuators. A: Physical|
|Publication status||Published - Mar 1992|
|Event||5th European Conference on Solid-State Transducers, Eurosensors V 1991 - Rome, Italy|
Duration: 30 Sep 1991 → 2 Oct 1991
Conference number: 5
van Mullem, C. J., Tilmans, H. A. C., Mouthaan, A. J., & Fluitman, J. H. J. (1992). Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor. Sensors and actuators. A: Physical, 31(1-3), 168-173. https://doi.org/10.1016/0924-4247(92)80099-O