Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor

C.J. van Mullem; H.A.C. Tilmans; A.J. Mouthaan; J.H.J. Fluitman

doi:10.1016/0924-4247(92)80099-O

Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor

C.J. van Mullem, H.A.C. Tilmans, A.J. Mouthaan, J.H.J. Fluitman

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Abstract

An important design consideration in the development of two-port resonant sensors is the electrical cross-talk between the input port and the output port. The overall transfer function H over-bar (jω) of the two-port sensor is equal to the vectorial sum of a transfer function representing the mechanical behavior and a transfer function representing the electrical cross-talk. The resonant silicon beam force sensor with a piezoelectric driver and an piezoelectric detector is analyzed. Two solutions to reduce the level of cross-talk are presented. Proper adjustment of the value of relevant components in the sensor geometry and/or electrical interruption of the bottom electrode result in a cross-talk level close to the noise level for the frequency range of interest.

Original language	English
Pages (from-to)	168-173
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	31
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(92)80099-O
Publication status	Published - Mar 1992
Event	5th European Conference on Solid-State Transducers, Eurosensors V 1991 - Rome, Italy Duration: 30 Sept 1991 → 2 Oct 1991 Conference number: 5

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title = "Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor",

abstract = "An important design consideration in the development of two-port resonant sensors is the electrical cross-talk between the input port and the output port. The overall transfer function H over-bar (jω) of the two-port sensor is equal to the vectorial sum of a transfer function representing the mechanical behavior and a transfer function representing the electrical cross-talk. The resonant silicon beam force sensor with a piezoelectric driver and an piezoelectric detector is analyzed. Two solutions to reduce the level of cross-talk are presented. Proper adjustment of the value of relevant components in the sensor geometry and/or electrical interruption of the bottom electrode result in a cross-talk level close to the noise level for the frequency range of interest.",

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AU - Fluitman, J.H.J.

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U2 - 10.1016/0924-4247(92)80099-O

DO - 10.1016/0924-4247(92)80099-O

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JO - Sensors and Actuators A: Physical

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ER -

Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor

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