Electro-acoustical measurements of silicon microphones on wafer scale

M. Pedersen, R. Schellin, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    11 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)2122-2128
    JournalJournal of the Acoustical Society of America
    Volume101
    Publication statusPublished - 1997

    Keywords

    • METIS-111985

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