Electro-acoustical measurements of silicon microphones on wafer scale

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Original language	English
Pages (from-to)	2122-2128
Journal	The Journal of the Acoustical Society of America
Volume	101
Publication status	Published - 1997

Cite this

@article{61ef452fed204dbba0db805d3afd3457,

title = "Electro-acoustical measurements of silicon microphones on wafer scale",

author = "Michael Pedersen and R. Schellin and Wouter Olthuis and Piet Bergveld",

year = "1997",

language = "English",

volume = "101",

pages = "2122--2128",

journal = "The Journal of the Acoustical Society of America",

issn = "0001-4966",

publisher = "Acoustical Society of America",

}