(Electro-) Mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonantors

H.A.C. Tilmans, R. Legtenberg, H. Schurer, D.J. IJntema, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)-
    JournalIEEE transactions on ultrasonics, ferroelectrics and frequency control
    Issue number40:6
    Publication statusPublished - 1993

    Keywords

    • METIS-111566

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