(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg, H. Schurer, D.J. IJntema, Michael Curt Elwenspoek, J.H.J. Fluitman

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar
Original languageEnglish
Pages (from-to)4-6
Number of pages3
JournalIEEE transactions on ultrasonics, ferroelectrics and frequency control
Volume1994
Issue number1
DOIs
Publication statusPublished - Jan 1994

Fingerprint

Polysilicon
Gages
Q factors
Resonators
resonators
Vacuum
Fabrication
vacuum
cavities
fabrication

Keywords

  • METIS-111568
  • IR-14364
  • EWI-14075

Cite this

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title = "(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators",
abstract = "The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar",
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year = "1994",
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volume = "1994",
pages = "4--6",
journal = "IEEE transactions on ultrasonics, ferroelectrics and frequency control",
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(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. / Tilmans, H.A.C.; Legtenberg, R.; Schurer, H.; IJntema, D.J.; Elwenspoek, Michael Curt; Fluitman, J.H.J.

In: IEEE transactions on ultrasonics, ferroelectrics and frequency control, Vol. 1994, No. 1, 01.1994, p. 4-6.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

AU - Tilmans, H.A.C.

AU - Legtenberg, R.

AU - Schurer, H.

AU - IJntema, D.J.

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

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N2 - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

AB - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

KW - METIS-111568

KW - IR-14364

KW - EWI-14075

U2 - 10.1109/58.265813

DO - 10.1109/58.265813

M3 - Article

VL - 1994

SP - 4

EP - 6

JO - IEEE transactions on ultrasonics, ferroelectrics and frequency control

JF - IEEE transactions on ultrasonics, ferroelectrics and frequency control

SN - 0885-3010

IS - 1

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