(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg, H. Schurer, D.J. IJntema, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

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    Abstract

    The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar
    Original languageEnglish
    Pages (from-to)4-6
    Number of pages3
    JournalIEEE transactions on ultrasonics, ferroelectrics and frequency control
    Volume1994
    Issue number1
    DOIs
    Publication statusPublished - Jan 1994

    Fingerprint

    Polysilicon
    Gages
    Q factors
    Resonators
    resonators
    Vacuum
    Fabrication
    vacuum
    cavities
    fabrication

    Keywords

    • METIS-111568
    • IR-14364
    • EWI-14075

    Cite this

    Tilmans, H.A.C. ; Legtenberg, R. ; Schurer, H. ; IJntema, D.J. ; Elwenspoek, Michael Curt ; Fluitman, J.H.J. / (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. In: IEEE transactions on ultrasonics, ferroelectrics and frequency control. 1994 ; Vol. 1994, No. 1. pp. 4-6.
    @article{624c5ebc912e424b829ad2c756af891f,
    title = "(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators",
    abstract = "The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar",
    keywords = "METIS-111568, IR-14364, EWI-14075",
    author = "H.A.C. Tilmans and R. Legtenberg and H. Schurer and D.J. IJntema and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",
    year = "1994",
    month = "1",
    doi = "10.1109/58.265813",
    language = "English",
    volume = "1994",
    pages = "4--6",
    journal = "IEEE transactions on ultrasonics, ferroelectrics and frequency control",
    issn = "0885-3010",
    publisher = "IEEE",
    number = "1",

    }

    (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. / Tilmans, H.A.C.; Legtenberg, R.; Schurer, H.; IJntema, D.J.; Elwenspoek, Michael Curt; Fluitman, J.H.J.

    In: IEEE transactions on ultrasonics, ferroelectrics and frequency control, Vol. 1994, No. 1, 01.1994, p. 4-6.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

    AU - Tilmans, H.A.C.

    AU - Legtenberg, R.

    AU - Schurer, H.

    AU - IJntema, D.J.

    AU - Elwenspoek, Michael Curt

    AU - Fluitman, J.H.J.

    PY - 1994/1

    Y1 - 1994/1

    N2 - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

    AB - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

    KW - METIS-111568

    KW - IR-14364

    KW - EWI-14075

    U2 - 10.1109/58.265813

    DO - 10.1109/58.265813

    M3 - Article

    VL - 1994

    SP - 4

    EP - 6

    JO - IEEE transactions on ultrasonics, ferroelectrics and frequency control

    JF - IEEE transactions on ultrasonics, ferroelectrics and frequency control

    SN - 0885-3010

    IS - 1

    ER -