(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans; R. Legtenberg; H. Schurer; D.J. IJntema; Michael Curt Elwenspoek; J.H.J. Fluitman

doi:10.1109/58.265813

(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg, H. Schurer, D.J. IJntema, Michael Curt Elwenspoek, J.H.J. Fluitman

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Abstract

The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

Original language	English
Pages (from-to)	4-6
Number of pages	3
Journal	IEEE transactions on ultrasonics, ferroelectrics and frequency control
Volume	1994
Issue number	1
DOIs	https://doi.org/10.1109/58.265813
Publication status	Published - Jan 1994

Keywords

METIS-111568
IR-14364
EWI-14075

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10.1109/58.265813

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title = "(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators",

abstract = "The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar",

keywords = "METIS-111568, IR-14364, EWI-14075",

author = "H.A.C. Tilmans and R. Legtenberg and H. Schurer and D.J. IJntema and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",

year = "1994",

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AU - Tilmans, H.A.C.

AU - Legtenberg, R.

AU - Schurer, H.

AU - IJntema, D.J.

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

PY - 1994/1

Y1 - 1994/1

N2 - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

AB - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

KW - METIS-111568

KW - IR-14364

KW - EWI-14075

U2 - 10.1109/58.265813

DO - 10.1109/58.265813

M3 - Article

SN - 0885-3010

VL - 1994

SP - 4

EP - 6

JO - IEEE transactions on ultrasonics, ferroelectrics and frequency control

JF - IEEE transactions on ultrasonics, ferroelectrics and frequency control

IS - 1

ER -

(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

Abstract

Keywords

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