(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg, H. Schurer, D.J. IJntema, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

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    69 Downloads (Pure)

    Abstract

    The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar
    Original languageEnglish
    Pages (from-to)4-6
    Number of pages3
    JournalIEEE transactions on ultrasonics, ferroelectrics and frequency control
    Volume1994
    Issue number1
    DOIs
    Publication statusPublished - Jan 1994

    Keywords

    • METIS-111568
    • IR-14364
    • EWI-14075

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