(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans; R. Legtenberg; H. Schurer; D.J. IJntema; M. Elwenspoek; J.H.J. Fluitman

doi:10.1109/58.265813

(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

H.A.C. Tilmans
, R. Legtenberg
, H. Schurer
, D.J. IJntema
, M. Elwenspoek
, J.H.J. Fluitman

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

Original language	English
Pages (from-to)	4-6
Number of pages	3
Journal	IEEE transactions on ultrasonics, ferroelectrics and frequency control
Volume	1994
Issue number	1
DOIs	https://doi.org/10.1109/58.265813
Publication status	Published - Jan 1994

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title = "(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators",

abstract = "The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar",

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AU - Tilmans, H.A.C.

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AU - Schurer, H.

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AU - Elwenspoek, M.

AU - Fluitman, J.H.J.

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N2 - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

AB - The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 μm long, 100 μm wide, and 1.5 μm thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar

U2 - 10.1109/58.265813

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M3 - Article

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JO - IEEE transactions on ultrasonics, ferroelectrics and frequency control

JF - IEEE transactions on ultrasonics, ferroelectrics and frequency control

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(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

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