Electrochemical actuator with a short response time: A new actuation regime

Vitaly Svetovoy, Ilia Uvarov, Alexander V. Postnikov, Remco G.P. Sanders, Gijsbertus J.M. Krijnen

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

The lack of fast and strong microactuators is a well-recognized problem in the MEMS community. Electro- chemical actuators can develop high pressure but they are notoriously slow. Water electrolysis produced by short voltage pulses of alternating polarity can overcome the problem of slow gas termination due to spontaneous ignition of the reaction between hydrogen and oxygen in nanobubbles. An actuation regime with the termination time as short as 100 s was demonstrated previously. Here we describe a new actuation regime, for which the gas pressure is relaxed just in 10 s and a minimal degradation of the electrodes is observed. The actuator consists of a microchamber filled with an electrolyte and cov- ered with a flexible silicon nitride membrane. The membrane bends outward when the pressure in the chamber increases. The new regime is characterized by the appearance of short-lived microbubbles in between the electrodes. Fast termination of gas and high pressure developed in the chamber are related to a high density of nanobubbles in the chamber. The physical processes happening in the chamber are discussed as well as problems that have to be resolved for practical applications of this actuation regime. The actuator can be used as a driving engine for microfluidics.
Original languageUndefined
Pages (from-to)1-6
Number of pages6
JournalSensors and actuators. A: Physical
Volume243
DOIs
Publication statusPublished - 1 Jun 2016

Keywords

  • EWI-26962
  • Electrochemical microactuator
  • IR-100273
  • Combustion
  • METIS-316902
  • nano bubbles

Cite this

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title = "Electrochemical actuator with a short response time: A new actuation regime",
abstract = "The lack of fast and strong microactuators is a well-recognized problem in the MEMS community. Electro- chemical actuators can develop high pressure but they are notoriously slow. Water electrolysis produced by short voltage pulses of alternating polarity can overcome the problem of slow gas termination due to spontaneous ignition of the reaction between hydrogen and oxygen in nanobubbles. An actuation regime with the termination time as short as 100 s was demonstrated previously. Here we describe a new actuation regime, for which the gas pressure is relaxed just in 10 s and a minimal degradation of the electrodes is observed. The actuator consists of a microchamber filled with an electrolyte and cov- ered with a flexible silicon nitride membrane. The membrane bends outward when the pressure in the chamber increases. The new regime is characterized by the appearance of short-lived microbubbles in between the electrodes. Fast termination of gas and high pressure developed in the chamber are related to a high density of nanobubbles in the chamber. The physical processes happening in the chamber are discussed as well as problems that have to be resolved for practical applications of this actuation regime. The actuator can be used as a driving engine for microfluidics.",
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author = "Vitaly Svetovoy and Ilia Uvarov and Postnikov, {Alexander V.} and Sanders, {Remco G.P.} and Krijnen, {Gijsbertus J.M.}",
note = "eemcs-eprint-26962",
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pages = "1--6",
journal = "Sensors and actuators. A: Physical",
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Electrochemical actuator with a short response time: A new actuation regime. / Svetovoy, Vitaly; Uvarov, Ilia; Postnikov, Alexander V.; Sanders, Remco G.P.; Krijnen, Gijsbertus J.M.

In: Sensors and actuators. A: Physical, Vol. 243, 01.06.2016, p. 1-6.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Electrochemical actuator with a short response time: A new actuation regime

AU - Svetovoy, Vitaly

AU - Uvarov, Ilia

AU - Postnikov, Alexander V.

AU - Sanders, Remco G.P.

AU - Krijnen, Gijsbertus J.M.

N1 - eemcs-eprint-26962

PY - 2016/6/1

Y1 - 2016/6/1

N2 - The lack of fast and strong microactuators is a well-recognized problem in the MEMS community. Electro- chemical actuators can develop high pressure but they are notoriously slow. Water electrolysis produced by short voltage pulses of alternating polarity can overcome the problem of slow gas termination due to spontaneous ignition of the reaction between hydrogen and oxygen in nanobubbles. An actuation regime with the termination time as short as 100 s was demonstrated previously. Here we describe a new actuation regime, for which the gas pressure is relaxed just in 10 s and a minimal degradation of the electrodes is observed. The actuator consists of a microchamber filled with an electrolyte and cov- ered with a flexible silicon nitride membrane. The membrane bends outward when the pressure in the chamber increases. The new regime is characterized by the appearance of short-lived microbubbles in between the electrodes. Fast termination of gas and high pressure developed in the chamber are related to a high density of nanobubbles in the chamber. The physical processes happening in the chamber are discussed as well as problems that have to be resolved for practical applications of this actuation regime. The actuator can be used as a driving engine for microfluidics.

AB - The lack of fast and strong microactuators is a well-recognized problem in the MEMS community. Electro- chemical actuators can develop high pressure but they are notoriously slow. Water electrolysis produced by short voltage pulses of alternating polarity can overcome the problem of slow gas termination due to spontaneous ignition of the reaction between hydrogen and oxygen in nanobubbles. An actuation regime with the termination time as short as 100 s was demonstrated previously. Here we describe a new actuation regime, for which the gas pressure is relaxed just in 10 s and a minimal degradation of the electrodes is observed. The actuator consists of a microchamber filled with an electrolyte and cov- ered with a flexible silicon nitride membrane. The membrane bends outward when the pressure in the chamber increases. The new regime is characterized by the appearance of short-lived microbubbles in between the electrodes. Fast termination of gas and high pressure developed in the chamber are related to a high density of nanobubbles in the chamber. The physical processes happening in the chamber are discussed as well as problems that have to be resolved for practical applications of this actuation regime. The actuator can be used as a driving engine for microfluidics.

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KW - Electrochemical microactuator

KW - IR-100273

KW - Combustion

KW - METIS-316902

KW - nano bubbles

U2 - 10.1016/j.sna.2016.03.002

DO - 10.1016/j.sna.2016.03.002

M3 - Article

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JO - Sensors and actuators. A: Physical

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SN - 0924-4247

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