Electrochemical Fabrication of Multi Walled Micro Channels

R.W. Tjerkstra; J.G.E. Gardeniers; M.C. Elwenspoek; A. van den Berg

doi:10.1007/978-94-011-5286-0_32

Electrochemical Fabrication of Multi Walled Micro Channels

R.W. Tjerkstra, J.G.E. Gardeniers, M.C. Elwenspoek, A. van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Electrochemical etching of silicon results in the formation of porous silicon or the electropolishing of the silicon, depending on the current density during etching. Using alternatingly high and low current densities we have been able to make so-called Multi Walled Micro Channels (MWμC’s) from p-type silicon. MWμC’s are microchannels containing one or more free-standing layers of porous silicon separating several coaxial channels. These channels can be used in many devices, for instance microsieves, microbatteries, or porous electrodes.

Original language	English
Title of host publication	Micro Total Analysis Systems ’98
Subtitle of host publication	Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998
Editors	D. Jed Harrison, Albert van den Berg
Place of Publication	Dordrecht
Publisher	Kluwer Academic Publishers
Pages	133-136
ISBN (Electronic)	978-94-011-5286-0
ISBN (Print)	978-94-010-6225-1
DOIs	https://doi.org/10.1007/978-94-011-5286-0_32
Publication status	Published - 25 Mar 1998
Event	3rd International Workshop on Micro Total Analysis Systems, μTAS 1998 - Banff, Canada Duration: 13 Oct 1998 → 16 Oct 1998 Conference number: 3

Workshop

Workshop	3rd International Workshop on Micro Total Analysis Systems, μTAS 1998
Abbreviated title	MicroTAS
Country/Territory	Canada
City	Banff
Period	13/10/98 → 16/10/98

Keywords

IR-16148
METIS-113033
Porous Silicon
Microchannel
electrochemical micromachining
Microsieve

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1007/978-94-011-5286-0_32

Cite this

Tjerkstra, R. W., Gardeniers, J. G. E., Elwenspoek, M. C., & van den Berg, A. (1998). Electrochemical Fabrication of Multi Walled Micro Channels. In D. J. Harrison, & A. van den Berg (Eds.), Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998 (pp. 133-136). Kluwer Academic Publishers. https://doi.org/10.1007/978-94-011-5286-0_32

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title = "Electrochemical Fabrication of Multi Walled Micro Channels",

abstract = "Electrochemical etching of silicon results in the formation of porous silicon or the electropolishing of the silicon, depending on the current density during etching. Using alternatingly high and low current densities we have been able to make so-called Multi Walled Micro Channels (MWμC{\textquoteright}s) from p-type silicon. MWμC{\textquoteright}s are microchannels containing one or more free-standing layers of porous silicon separating several coaxial channels. These channels can be used in many devices, for instance microsieves, microbatteries, or porous electrodes.",

keywords = "IR-16148, METIS-113033, Porous Silicon, Microchannel, electrochemical micromachining, Microsieve",

author = "R.W. Tjerkstra and J.G.E. Gardeniers and M.C. Elwenspoek and {van den Berg}, A.",

year = "1998",

month = mar,

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doi = "10.1007/978-94-011-5286-0_32",

language = "English",

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booktitle = "Micro Total Analysis Systems {\textquoteright}98",

publisher = "Kluwer Academic Publishers",

address = "Netherlands",

note = "3rd International Workshop on Micro Total Analysis Systems, μTAS 1998, MicroTAS ; Conference date: 13-10-1998 Through 16-10-1998",

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Tjerkstra, RW, Gardeniers, JGE, Elwenspoek, MC & van den Berg, A 1998, Electrochemical Fabrication of Multi Walled Micro Channels. in DJ Harrison & A van den Berg (eds), Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Kluwer Academic Publishers, Dordrecht, pp. 133-136, 3rd International Workshop on Micro Total Analysis Systems, μTAS 1998, Banff, Canada, 13/10/98. https://doi.org/10.1007/978-94-011-5286-0_32

Electrochemical Fabrication of Multi Walled Micro Channels. / Tjerkstra, R.W.; Gardeniers, J.G.E.; Elwenspoek, M.C. et al.
Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. ed. / D. Jed Harrison; Albert van den Berg. Dordrecht: Kluwer Academic Publishers, 1998. p. 133-136.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Electrochemical Fabrication of Multi Walled Micro Channels

AU - Tjerkstra, R.W.

AU - Gardeniers, J.G.E.

AU - Elwenspoek, M.C.

AU - van den Berg, A.

N1 - Conference code: 3

PY - 1998/3/25

Y1 - 1998/3/25

N2 - Electrochemical etching of silicon results in the formation of porous silicon or the electropolishing of the silicon, depending on the current density during etching. Using alternatingly high and low current densities we have been able to make so-called Multi Walled Micro Channels (MWμC’s) from p-type silicon. MWμC’s are microchannels containing one or more free-standing layers of porous silicon separating several coaxial channels. These channels can be used in many devices, for instance microsieves, microbatteries, or porous electrodes.

AB - Electrochemical etching of silicon results in the formation of porous silicon or the electropolishing of the silicon, depending on the current density during etching. Using alternatingly high and low current densities we have been able to make so-called Multi Walled Micro Channels (MWμC’s) from p-type silicon. MWμC’s are microchannels containing one or more free-standing layers of porous silicon separating several coaxial channels. These channels can be used in many devices, for instance microsieves, microbatteries, or porous electrodes.

KW - IR-16148

KW - METIS-113033

KW - Porous Silicon

KW - Microchannel

KW - electrochemical micromachining

KW - Microsieve

U2 - 10.1007/978-94-011-5286-0_32

DO - 10.1007/978-94-011-5286-0_32

M3 - Conference contribution

SN - 978-94-010-6225-1

SP - 133

EP - 136

BT - Micro Total Analysis Systems ’98

A2 - Harrison, D. Jed

A2 - van den Berg, Albert

PB - Kluwer Academic Publishers

CY - Dordrecht

T2 - 3rd International Workshop on Micro Total Analysis Systems, μTAS 1998

Y2 - 13 October 1998 through 16 October 1998

ER -

Tjerkstra RW, Gardeniers JGE, Elwenspoek MC, van den Berg A. Electrochemical Fabrication of Multi Walled Micro Channels. In Harrison DJ, van den Berg A, editors, Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Dordrecht: Kluwer Academic Publishers. 1998. p. 133-136 doi: 10.1007/978-94-011-5286-0_32

Electrochemical Fabrication of Multi Walled Micro Channels

Abstract

Workshop

Keywords

UN SDGs

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Cite this