Electrochemical Fabrication of Multi Walled Micro Channels

R.W. Tjerkstra, J.G.E. Gardeniers, M.C. Elwenspoek, A. van den Berg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Electrochemical etching of silicon results in the formation of porous silicon or the electropolishing of the silicon, depending on the current density during etching. Using alternatingly high and low current densities we have been able to make so-called Multi Walled Micro Channels (MWμC’s) from p-type silicon. MWμC’s are microchannels containing one or more free-standing layers of porous silicon separating several coaxial channels. These channels can be used in many devices, for instance microsieves, microbatteries, or porous electrodes.
Original languageEnglish
Title of host publicationMicro Total Analysis Systems ’98
Subtitle of host publicationProceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998
EditorsD. Jed Harrison, Albert van den Berg
Place of PublicationDordrecht
PublisherKluwer Academic Publishers
Pages133-136
ISBN (Electronic)978-94-011-5286-0
ISBN (Print)978-94-010-6225-1
DOIs
Publication statusPublished - 25 Mar 1998
Event3rd International Workshop on Micro Total Analysis Systems, μTAS 1998 - Banff, Canada
Duration: 13 Oct 199816 Oct 1998
Conference number: 3

Workshop

Workshop3rd International Workshop on Micro Total Analysis Systems, μTAS 1998
Abbreviated titleMicroTAS
CountryCanada
CityBanff
Period13/10/9816/10/98

Keywords

  • IR-16148
  • METIS-113033
  • Porous Silicon
  • Microchannel
  • electrochemical micromachining
  • Microsieve

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  • Cite this

    Tjerkstra, R. W., Gardeniers, J. G. E., Elwenspoek, M. C., & van den Berg, A. (1998). Electrochemical Fabrication of Multi Walled Micro Channels. In D. J. Harrison, & A. van den Berg (Eds.), Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998 (pp. 133-136). Dordrecht: Kluwer Academic Publishers. https://doi.org/10.1007/978-94-011-5286-0_32