Electrochemical micro actuator

M.W. Hamberg; C. Neagu; J.G.E. Gardeniers; D.J. IJntema; M. Elwenspoek

doi:10.1109/MEMSYS.1995.472545

Electrochemical micro actuator

M.W. Hamberg, C. Neagu, J.G.E. Gardeniers, D.J. IJntema, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

16 Citations (Scopus)

190 Downloads (Pure)

Abstract

In this paper an investigation of the feasibility of a new electrochemical micro actuator is presented. The actuator is fabricated using silicon micro-machining techniques. A gas pressure is generated by electrolysis of an aqueous electrolyte solution. The build up pressure is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reduce the pressure. The advantage of this type of actuation is a low energy consumption. The power is required during pressure build up and to change the states.

Original language	English
Title of host publication	Proceedings IEEE Micro Electro Mechanical Systems, MEMS '95
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	106-110
Number of pages	6
ISBN (Print)	0-7803-2503-6
DOIs	https://doi.org/10.1109/MEMSYS.1995.472545
Publication status	Published - 29 Jan 1995
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands Duration: 29 Jan 1995 → 2 Feb 1995

Workshop

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
Abbreviated title	MEMS
Country/Territory	Netherlands
City	Amsterdam
Period	29/01/95 → 2/02/95

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10.1109/MEMSYS.1995.472545

Hamberg1995electrochemicalFinal published version, 431 KB

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title = "Electrochemical micro actuator",

abstract = "In this paper an investigation of the feasibility of a new electrochemical micro actuator is presented. The actuator is fabricated using silicon micro-machining techniques. A gas pressure is generated by electrolysis of an aqueous electrolyte solution. The build up pressure is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reduce the pressure. The advantage of this type of actuation is a low energy consumption. The power is required during pressure build up and to change the states.",

author = "M.W. Hamberg and C. Neagu and J.G.E. Gardeniers and D.J. IJntema and M. Elwenspoek",

year = "1995",

month = jan,

day = "29",

doi = "10.1109/MEMSYS.1995.472545",

language = "English",

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pages = "106--110",

booktitle = "Proceedings IEEE Micro Electro Mechanical Systems, MEMS '95",

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address = "United States",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995, MEMS ; Conference date: 29-01-1995 Through 02-02-1995",

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TY - GEN

T1 - Electrochemical micro actuator

AU - Hamberg, M.W.

AU - Neagu, C.

AU - Gardeniers, J.G.E.

AU - IJntema, D.J.

AU - Elwenspoek, M.

PY - 1995/1/29

Y1 - 1995/1/29

N2 - In this paper an investigation of the feasibility of a new electrochemical micro actuator is presented. The actuator is fabricated using silicon micro-machining techniques. A gas pressure is generated by electrolysis of an aqueous electrolyte solution. The build up pressure is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reduce the pressure. The advantage of this type of actuation is a low energy consumption. The power is required during pressure build up and to change the states.

AB - In this paper an investigation of the feasibility of a new electrochemical micro actuator is presented. The actuator is fabricated using silicon micro-machining techniques. A gas pressure is generated by electrolysis of an aqueous electrolyte solution. The build up pressure is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reduce the pressure. The advantage of this type of actuation is a low energy consumption. The power is required during pressure build up and to change the states.

U2 - 10.1109/MEMSYS.1995.472545

DO - 10.1109/MEMSYS.1995.472545

M3 - Conference contribution

SN - 0-7803-2503-6

SP - 106

EP - 110

BT - Proceedings IEEE Micro Electro Mechanical Systems, MEMS '95

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995

Y2 - 29 January 1995 through 2 February 1995

ER -

Electrochemical micro actuator

Abstract

Workshop

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