Electrochemical micro actuator

M.W. Hamberg, C. Neagu, J.G.E. Gardeniers, D.J. IJntema, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

16 Citations (Scopus)
165 Downloads (Pure)


In this paper an investigation of the feasibility of a new electrochemical micro actuator is presented. The actuator is fabricated using silicon micro-machining techniques. A gas pressure is generated by electrolysis of an aqueous electrolyte solution. The build up pressure is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reduce the pressure. The advantage of this type of actuation is a low energy consumption. The power is required during pressure build up and to change the states.
Original languageEnglish
Title of host publicationProceedings IEEE Micro Electro Mechanical Systems, MEMS '95
Place of PublicationPiscataway, NJ
Number of pages6
ISBN (Print)0-7803-2503-6
Publication statusPublished - 29 Jan 1995
EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
Duration: 29 Jan 19952 Feb 1995


WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
Abbreviated titleMEMS


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