@inproceedings{0800670801804cf7a3e56ab9976846d4,
title = "Electrochemical microvalve",
keywords = "METIS-114117, IR-17222",
author = "C.R. Rusu and Cristina Neagu and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",
year = "1996",
month = mar,
day = "20",
language = "English",
isbn = "9789040713217",
publisher = "Platform {"}Sensor Technology",
pages = "21--24",
booktitle = "Proceedings 1996 National Sensor Conference",
note = "1996 National Sensor Conference ; Conference date: 20-03-1996 Through 21-03-1996",
}