Electrochemical microvalve

C.R. Rusu, Cristina Neagu, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings 1996 National Sensor Conference
Place of PublicationDelft, the Netherlands
PublisherPlatform "Sensor Technology
Pages21-24
ISBN (Print)9789040713217
Publication statusPublished - 20 Mar 1996
Event1996 National Sensor Conference - Delft, The Netherlands, Delft, Netherlands
Duration: 20 Mar 199621 Mar 1996

Publication series

Name
PublisherPlatform "Sensor Technology"

Conference

Conference1996 National Sensor Conference
CountryNetherlands
CityDelft
Period20/03/9621/03/96
OtherMarch 20-21, 1996

Keywords

  • METIS-114117
  • IR-17222

Cite this

Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C., & Fluitman, J. H. J. (1996). Electrochemical microvalve. In Proceedings 1996 National Sensor Conference (pp. 21-24). Delft, the Netherlands: Platform "Sensor Technology.