Electrochemistry in anisotropic etching of silicon in alkaline solutions

Quoc Duy Nguyen

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    66 Downloads (Pure)

    Abstract

    Etching is the process of using an acidic or caustic chemical to cut into unprotected areas of a particular material. Initially used in the 15th century for decorating plate armor and sword blades, the metal surface (typically steel or copper) was first covered with a wax-like material. Part of the wax was removed to create decorative patterns. These were subsequently transfered into the metal by submerging the surface in an acid solution (the etchant). The German artist Daniel Hopfer is believed to be the first to use the etching process in printmaking, competing with the, at the time more common, engraving techniques. For artists, its great advantage lies in the simplicity of the technique which does not require special skills in metal working. Scratching the drawings directly into the waxlayer allowed for highly detailed etchings and prints. This technique has been used by many great artist throughout the centuries.
    Original languageEnglish
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Elwenspoek, M.C., Supervisor
    • Sato, E.K., Advisor
    • French, P., Advisor
    • Kelly, John J., Advisor, External person
    • Vlieg, Elias, Advisor, External person
    • Gardeniers, J.G.E., Advisor
    • Jansen, H.V., Advisor
    • van Veenendaal, Erik, Advisor, External person
    Thesis sponsors
    Award date27 Aug 2007
    Place of PublicationEnschede
    Publisher
    Print ISBNs978-90-365-2551-0
    Publication statusPublished - 27 Aug 2007

    Keywords

    • IR-58029
    • EWI-11922
    • METIS-246022

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  • Cite this

    Nguyen, Q. D. (2007). Electrochemistry in anisotropic etching of silicon in alkaline solutions. Enschede: University of Twente.