Electromechanical modelling of electrostatically driven microresonators, part I: Basic theory

H.A.C. Tilmans

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	312-321
Journal	International journal of modelling & simulation
Volume	19
Issue number	3
Publication status	Published - 1999

Keywords

@article{f7c49daca57c493f864186a6d2894026,

title = "Electromechanical modelling of electrostatically driven microresonators, part I: Basic theory",

keywords = "METIS-111699",

author = "H.A.C. Tilmans",

year = "1999",

language = "Undefined",

volume = "19",

pages = "312--321",

journal = "International journal of modelling & simulation",

issn = "0228-6203",

publisher = "Taylor & Francis",

number = "3",

}