Electromechanical modelling of electrostatically driven microresonators, part I: Basic theory

H.A.C. Tilmans

    Research output: Contribution to journalArticleAcademicpeer-review

    3 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)312-321
    JournalInternational journal of modelling and simulation
    Volume19
    Issue number3
    Publication statusPublished - 1999

    Keywords

    • METIS-111699

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