Electromechanical modelling of electrostatically driven microresonators, part II: Applications

H.A.C. Tilmans

    Research output: Contribution to journalArticleAcademicpeer-review

    1 Citation (Scopus)
    Original languageUndefined
    Pages (from-to)364-373
    JournalInternational journal of modelling and simulation
    Volume19
    Issue number4
    Publication statusPublished - 1999

    Keywords

    • METIS-111702

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