Electromechanical modelling of electrostatically driven microresonators, part II: Applications

Electrostatically driven mechanical beam resonators that are operating in a flexural mode of vibration are further examined. The electromechanical transfer functions and the equivalent circuit representations that were derived in Part I form the basis to clarify some characteristics of the resonator behaviour. Resonators configured as an electric one-port as well as a two-port are considered in detail. Among the issues that will be discussed are: the characteristic frequencies, the electromechanical coupling factor and the figure of merit of a resonator, further, mode suppression, the influence of parasitic loads and electric feedthrough and strategies to minimize the latter. Finally some experimental results are presented, that will convincingly demonstrate the applicability of the equivalent circuits.