Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever

L.J. Kauppinen, S.M. Chakkalakkal Abdulla, Gijsbertus J.M. Krijnen, Markus Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring can be tuned over a 50 pm wavelength range by applying 8.5 V, without affecting its Q-factor.
    Original languageEnglish
    Title of host publicationConference on Lasers and Electro-Optics, CLEO/Europe
    Place of PublicationWashington, DC
    PublisherOptical Society of America
    PagesPaper CE5.1
    Number of pages1
    ISBN (Print)978-1-4577-0532-8
    Publication statusPublished - May 2011
    EventEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009 - Munich, Germany
    Duration: 22 May 201126 May 2011

    Publication series

    NameOnline Conference Digest
    PublisherOptical Society of America

    Conference

    ConferenceEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009
    Abbreviated titleCLEO-Europe/EQEC 2011
    CountryGermany
    CityMunich
    Period22/05/1126/05/11

    Keywords

    • METIS-277683
    • IR-77572
    • EWI-20264
    • IOMS-APD: Active Photonic Devices
    • TST-ACTUATORS

    Fingerprint

    Dive into the research topics of 'Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever'. Together they form a unique fingerprint.

    Cite this