Electromigration early resistance increase measurements

J. Niehof, P.A. Flinn, T.J. Maloney

    Research output: Contribution to journalArticleAcademicpeer-review

    4 Citations (Scopus)
    165 Downloads (Pure)

    Abstract

    An early resistance change measurement set-up, using an AC bridge technique, has been developed, and measurements have been performed. Large sample-to-sample variations occur. The characteristic time for the resistance change curve is shorter for resistance increase (under current stress) than for resistance decay (during recovery).
    Original languageEnglish
    Pages (from-to)295-298
    JournalQuality and reliability engineering international
    Volume9
    Issue number4
    DOIs
    Publication statusPublished - 1993

    Keywords

    • METIS-112035
    • IR-71007
    • Characteristic time
    • Void
    • Resistance change
    • Electromigration
    • Healing
    • AC bridge

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