Electronegativity-dependent cleaning of tin from metal capping layers

Research output: Contribution to conference › Poster

Cite this

@conference{293393e49d7842cdb189a4039e37c514,

title = "Electronegativity-dependent cleaning of tin from metal capping layers",

keywords = "METIS-307239",

author = "Malgorzata Pachecka and Sturm, {Jacobus Marinus} and Lee, {Christopher James} and Frederik Bijkerk",

year = "2014",

month = "10",

day = "27",

language = "English",

pages = "--",

}