Electronegativity-dependent cleaning of tin from metal capping layers

Malgorzata Pachecka, Jacobus Marinus Sturm, Christopher James Lee, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original languageEnglish
Pages-
Publication statusPublished - 27 Oct 2014

Keywords

  • METIS-307239

Cite this

Pachecka, Malgorzata ; Sturm, Jacobus Marinus ; Lee, Christopher James ; Bijkerk, Frederik. / Electronegativity-dependent cleaning of tin from metal capping layers.
@conference{293393e49d7842cdb189a4039e37c514,
title = "Electronegativity-dependent cleaning of tin from metal capping layers",
keywords = "METIS-307239",
author = "Malgorzata Pachecka and Sturm, {Jacobus Marinus} and Lee, {Christopher James} and Frederik Bijkerk",
year = "2014",
month = "10",
day = "27",
language = "English",
pages = "--",

}

Pachecka, M, Sturm, JM, Lee, CJ & Bijkerk, F 2014, 'Electronegativity-dependent cleaning of tin from metal capping layers' pp. -.

Electronegativity-dependent cleaning of tin from metal capping layers. / Pachecka, Malgorzata; Sturm, Jacobus Marinus; Lee, Christopher James; Bijkerk, Frederik.

2014. -.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Electronegativity-dependent cleaning of tin from metal capping layers

AU - Pachecka, Malgorzata

AU - Sturm, Jacobus Marinus

AU - Lee, Christopher James

AU - Bijkerk, Frederik

PY - 2014/10/27

Y1 - 2014/10/27

KW - METIS-307239

M3 - Poster

SP - -

ER -

Pachecka M, Sturm JM, Lee CJ, Bijkerk F. Electronegativity-dependent cleaning of tin from metal capping layers. 2014.