Original language | Undefined |
---|---|
Title of host publication | Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) |
Place of Publication | Cannes Mandelieu, France |
Pages | 27-32 |
Number of pages | 6 |
Publication status | Published - 2003 |
Keywords
- METIS-214903
Hans G. Kerkhoff, M. Acar
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) |
Place of Publication | Cannes Mandelieu, France |
Pages | 27-32 |
Number of pages | 6 |
Publication status | Published - 2003 |