A fabrication technology based on polysilicon surface micromachining techniques and first actuator designs based on electrostatic actuation have been presented in this thesis. Emphasis has been given to the design of actuators which can generate relatively large forces and displacement. High output actuators are generally attractive in many (possible) applications.
|Award date||4 Apr 1996|
|Place of Publication||Enschede|
|Publication status||Published - 4 Apr 1996|