Electrostatic actuators fabricated by surface micromachining techniques

Rob Legtenberg

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    162 Downloads (Pure)


    A fabrication technology based on polysilicon surface micromachining techniques and first actuator designs based on electrostatic actuation have been presented in this thesis. Emphasis has been given to the design of actuators which can generate relatively large forces and displacement. High output actuators are generally attractive in many (possible) applications.
    Original languageEnglish
    Awarding Institution
    • University of Twente
    • Fluitman, J.H.J., Supervisor
    • Popma, T.J.A., Supervisor
    • Elwenspoek, M.C., Co-Supervisor
    Thesis sponsors
    Award date4 Apr 1996
    Place of PublicationEnschede
    Print ISBNs90-3650796-0
    Publication statusPublished - 4 Apr 1996


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