Electrostatic curved electrode actuators

R. Legtenberg; Johan W. Berenschot; Michael Curt Elwenspoek; J.H.J. Fluitman

Electrostatic curved electrode actuators

R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

31 Citations (Scopus)

199 Downloads (Pure)

Abstract

In this paper, the design, fabrication, and first experimental results of electrostatic curved electrode actuators are addressed. The actuator design is based upon the deformation of a movable micromechanical structure by electrostatic forces using a fixed curved electrode. When a voltage is applied, an electrostatic force is created that will deform the free structure along the outline of the fixed curved electrode. To investigate the basic phenomena of this type of actuators, research has been focused on cantilever beam structures. For the shape of the curved electrode simple polynomials, normalized to the maximal deflection, have been used. A theory is presented, describing the static behaviour of this type of actuators. Devices are fabricated from polysilicon by surface micromachining techniques. Displacements of several tens of micrometers and forces of several FN can be generated for cantilever beams with a length of several hundred micrometers.

Original language	English
Title of host publication	Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Place of Publication	Piscataway
Publisher	IEEE Computer Society
Pages	37-42
Number of pages	6
ISBN (Print)	0-7803-2503-6
Publication status	Published - 29 Jan 1995
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands Duration: 29 Jan 1995 → 2 Feb 1995

Workshop

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
Abbreviated title	MEMS
Country	Netherlands
City	Amsterdam
Period	29/01/95 → 2/02/95

Keywords

METIS-112906
EWI-13887
IR-16024

Access to Document

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Legtenberg95electro
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http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=472557

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Cite this

@inproceedings{a98dfb61a4c346d88557c200d29d59a0,

title = "Electrostatic curved electrode actuators",

abstract = "In this paper, the design, fabrication, and first experimental results of electrostatic curved electrode actuators are addressed. The actuator design is based upon the deformation of a movable micromechanical structure by electrostatic forces using a fixed curved electrode. When a voltage is applied, an electrostatic force is created that will deform the free structure along the outline of the fixed curved electrode. To investigate the basic phenomena of this type of actuators, research has been focused on cantilever beam structures. For the shape of the curved electrode simple polynomials, normalized to the maximal deflection, have been used. A theory is presented, describing the static behaviour of this type of actuators. Devices are fabricated from polysilicon by surface micromachining techniques. Displacements of several tens of micrometers and forces of several FN can be generated for cantilever beams with a length of several hundred micrometers.",

keywords = "METIS-112906, EWI-13887, IR-16024",

author = "R. Legtenberg and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",

year = "1995",

month = jan,

day = "29",

language = "English",

isbn = "0-7803-2503-6",

pages = "37--42",

booktitle = "Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE",

publisher = "IEEE Computer Society",

address = "United States",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995, MEMS ; Conference date: 29-01-1995 Through 02-02-1995",

}

Legtenberg, R, Berenschot, JW, Elwenspoek, MC & Fluitman, JHJ 1995, Electrostatic curved electrode actuators. in Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE. IEEE Computer Society, Piscataway, pp. 37-42, IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995, Amsterdam, Netherlands, 29/01/95. <http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=472557>

TY - GEN

T1 - Electrostatic curved electrode actuators

AU - Legtenberg, R.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

PY - 1995/1/29

Y1 - 1995/1/29

N2 - In this paper, the design, fabrication, and first experimental results of electrostatic curved electrode actuators are addressed. The actuator design is based upon the deformation of a movable micromechanical structure by electrostatic forces using a fixed curved electrode. When a voltage is applied, an electrostatic force is created that will deform the free structure along the outline of the fixed curved electrode. To investigate the basic phenomena of this type of actuators, research has been focused on cantilever beam structures. For the shape of the curved electrode simple polynomials, normalized to the maximal deflection, have been used. A theory is presented, describing the static behaviour of this type of actuators. Devices are fabricated from polysilicon by surface micromachining techniques. Displacements of several tens of micrometers and forces of several FN can be generated for cantilever beams with a length of several hundred micrometers.

AB - In this paper, the design, fabrication, and first experimental results of electrostatic curved electrode actuators are addressed. The actuator design is based upon the deformation of a movable micromechanical structure by electrostatic forces using a fixed curved electrode. When a voltage is applied, an electrostatic force is created that will deform the free structure along the outline of the fixed curved electrode. To investigate the basic phenomena of this type of actuators, research has been focused on cantilever beam structures. For the shape of the curved electrode simple polynomials, normalized to the maximal deflection, have been used. A theory is presented, describing the static behaviour of this type of actuators. Devices are fabricated from polysilicon by surface micromachining techniques. Displacements of several tens of micrometers and forces of several FN can be generated for cantilever beams with a length of several hundred micrometers.

KW - METIS-112906

KW - EWI-13887

KW - IR-16024

M3 - Conference contribution

SN - 0-7803-2503-6

SP - 37

EP - 42

BT - Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

PB - IEEE Computer Society

CY - Piscataway

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995

Y2 - 29 January 1995 through 2 February 1995

ER -