Electrostatic curved electrode actuators

R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    31 Citations (Scopus)
    199 Downloads (Pure)

    Abstract

    In this paper, the design, fabrication, and first experimental results of electrostatic curved electrode actuators are addressed. The actuator design is based upon the deformation of a movable micromechanical structure by electrostatic forces using a fixed curved electrode. When a voltage is applied, an electrostatic force is created that will deform the free structure along the outline of the fixed curved electrode. To investigate the basic phenomena of this type of actuators, research has been focused on cantilever beam structures. For the shape of the curved electrode simple polynomials, normalized to the maximal deflection, have been used. A theory is presented, describing the static behaviour of this type of actuators. Devices are fabricated from polysilicon by surface micromachining techniques. Displacements of several tens of micrometers and forces of several FN can be generated for cantilever beams with a length of several hundred micrometers.
    Original languageEnglish
    Title of host publicationMicro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages37-42
    Number of pages6
    ISBN (Print)0-7803-2503-6
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS
    CountryNetherlands
    CityAmsterdam
    Period29/01/952/02/95

    Keywords

    • METIS-112906
    • EWI-13887
    • IR-16024

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